Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

7

Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

MGG

135 12 14 180 158 250 228 25 25 Rc 1/4 200 M12 x 1.75 depth 28 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 Rc 3/8 230 M14 x 2 depth 30 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300 30 32 Rc 1/2 280 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q Y

Table of Contents

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B ( ) ( ) (170) 110 20 95 95 A ( ) ( ) (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E G Without lock With lock 50, 100, 150 4 130 200, 250, 300 6 2 300 280 350, 400, 450 8 3 450 430 500, 550, 600 10 4 600 580 650, 700, 750 12 5 750 730 800, 850, 900 14 6 900 880 950, 1000 16 7 1050 1030 23 314.9 359.9 6 130 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line

MY1

Allowable Moment MY1HT/M1 MY1HT/M3 1000 1000 500 500 300 300 Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 100 100 MY1HT50 MY1HT50 (2) (4) (1) (3) 50 50 40 40 30 30 20 20 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) 8-11-93 89 Mechanically Jointed Rodless Cylinder High Rigidity/High Precision Guide Type Series MY1HT 50, 63 How to Order MY1HT 50

LG1H

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) 110 20 95 95 A () () (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

VZ100/300/500

216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor 4-6-10 11 3 Port Solenoid Valve Rubber Seal, Body Ported Series VZ100 Type 20 Manifold: Top Ported VV4Z1-20Stations 1(-F) Grommet (G), (H) (Mounting hole) V100 SY SYJ Manual override (Non-locking

Table of Contents

B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to

CV/MVGQ

15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

CV/MVGQ

13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26 0 0.033 0 0.039 42.5 50 21.5 16 M14 x 1.5 14 39 30 7 21 15 46.5 24 10 84.5 Up to 300 22 8 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

Guide Cylinder Series MGG

135 12 14 180 158 250 228 25 25 Rc 1/4 200 M12 x 1.75 depth 28 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 Rc 3/8 230 M14 x 2 depth 30 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300 30 32 Rc 1/2 280 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q Y

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Table of Contents

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.

Hydraulic

300 320 340 360 10 330 350 370 390 410 430 450 470 490 510 610 710 52 480 500 520 540 560 580 600 620 640 660 760 860 52 860 890 920 950 980 1010 1040 1070 1100 1250 1400 100 1250 1290 1330 1370 1410 1450 1490 1530 1570 1770 1970 100 2380 2470 2560 2650 2740 2830 2920 3010 3100 3550 4000 172 3520 3630 3740 3850 3960 4070 4180 4290 4400 4950 5500 283 Specific Product Precautions Be

SQ1000/2000

Dimension L (mm) Dimension L (mm) Dimension L (mm) Dimension L (mm) Station 2 3 4 5 6 7 Station 14 15 16 17 18 19 Station 20 21 22 23 24 Station 8 9 10 11 12 13 SE 165 175 190 205 215 230 245 260 280 290 300 310 400 405 420 435 450 320 335 350 365 375 385 SSQ1000 Note) Part number for a 10 piece set of elements. Refer to page 134 for replacement procedures.