Table of Contents

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

MG

25 st to 175 st 20 20 21 19 10.5 22 78 84.5 122 12 0 6.5 44 25 25 26.5 16 8 19.5 78.5 85 122 16 0 6.5 43.5 MGPL (Ball bushing bearing) A, DB, E Dimensions A E Bore size (mm) DB 75 st or less Over 175 st 250 st Over 75 st to 175 st 75 st or less Over 175 st 250 st Over 75 st to 175 st 20 80 104 122 10 2 26 44 25 85.5 104.5 122 13 7 26 43.5 8-19-46 Series MGP Compact Guide Cylinder With End

SY

C4 C6 2 123 112.5 91.5 15.5 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 210.5 200 175.5 17.5 198 187.5 165 16.5 185.5 175 154.5 15.5 173 162.5 144 14.5 160.5 150 133.5 13.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45GUStations B-C4 C6 Stations n L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 185.5 175 160.5 12.5 185.5 175 150 17.5 198 187.5 171 13.5 210.5 200 181.5

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

Made to Order

66 44 20 64 10.5 7 75, 100 167.5 50.5 63 50 or less 165 46 175 56 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 175 56 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

SX

Purchasing order is available in units of 10 pieces.

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

NCQ8

150 175 200 250 300 350 400 NCQ8WB200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQW8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #10-24UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-1/2 2-3/4 3 3-1/4 3-3/4 4-1/4 4-3/4 5-1/4 1/4-20UNC1-5/8 1

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

MGP

75mm stroke V = 200mm/s 20 20 25 10 10 25 Load weight m (kg) Load weight m (kg) 20 20 5 5 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 7 25mm stroke V = 200mm/s 8 Over 25mm stroke V = 200mm/s 100 100 63 63 50 50 50 50 Load weight m (kg) Load weight m (kg) 40 40 32 32 10 10 5 10 50 100 200 5 10 50 100 200 Eccentric distance l (mm)

MGP

12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5

A

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

MB

11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

10

, 400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Cylinder with Lock

2 (Different surfaces) 10 n 10 + 30 (n 2) D-A9l 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-A9lV 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

CA2

195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 M8 x 1.25 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 10 12 16 20 25 16 19 23 28 36 1/4 3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32