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90 Refer to page 300 for mounting.

Made to Order

CS1 series Without auto switch With auto switch H 120 120 130 145 145 175 190 Bore size (mm) F 50 50 50 55 55 69 69 ZZ 245 245 266.5 291 291 357.5 387.5 F 50 50 50 55 55 H 120 120 130 145 145 ZZ 245 245 266.5 295 300 125 140 160 180 200 250 300 F H ZZ + Stroke (mm) MB series Bore size H ZZ 32 47 135 40 58 146 50 67 165 63 67 165 80 81 199 100 81 199 ZZ + Stroke H (mm) MB1 series Bore

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200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

38.3 30 40 M6 x 1.0 10 8.5 40 to 100 68 105 to 120 190.5 160 125 to 200 85 205 to 300 102 32 Size Stroke range [mm] OA OB P Q S T U V WA WB WC X XA XB Y Z 35 26 70 15 to 35 54 4 5 26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85

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300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

6 117 104 5 101 88 4 85 72 Stations 2 3 53 40 69 56 20 341 328 L1 L2 19 325 312 18 309 296 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L3 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L4 L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 300 (Lead wire length) : With light/surge

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

15

5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 40 to 100 67.5 105 to 120 114.5 125 to 200 84.5 205 to 300 102 25 Up to 35 96 55 25 60 101 123 63.8 12 16.5 5.4 50.3 125.3 38.3 30 40 M6 x 1.0 10 40 to 100 68 105 to 120 126 125 to 200 85 205 to 300 102 32 Size Stroke range [mm] NC OA OB P Q S T U WA WB WC X XA XB Y1 Y2 Z 35 26 70 Up to 35 54 4 5 26.5 22 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70

MB

110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 90 + 55 130 + 55 95 + 55 n = 4, 8, 12, 16 n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 90 110 115 120 95 130 140 120 125 130 2 (Different sides or Same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130 + 55 (n4) 2 (n4) 2 105 + 55 n =

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

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IDG75M IDG100M IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 75 110 170 240 300 IDG60SM IDG75SM IDG100SM 50 100 150 Type V A regulator combined with the type M IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V IDG3HV IDG5HV IDG10HV IDG20HV IDG30HV

LJ1H

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

1

167 15 17 29 29 25 27 39 39 77 77 20 24 24 24 40 44 44 44 120 120 200 200 200 300 300 300 124 124 128 124 20 72 320 90 74 148 220 121 171 28 64 210 236 35 47 85 100 11 32.5 89 48 188 210 166 17.5 M14 x 2.0 200 200 6-17-108 6-17-109 89 Made to Order Common Specifications: -XC71: Helical Insert Thread Specifications -XC72: Without Built-in Auto Switch Magnet Symbol -XC71 47 Helical Insert

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Type Lube Non-lube Air-hydro 125 140 160 Bore size Nil N H Lube, Non-lube Air-hydro 125 140 160 180 200 250 300 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. 125 140 160 180 200 250 300 Bore size (mm) For How to Order with auto switch, refer to page 6-9-7.

CQ2

Cylinder stroke Weight Option Weights Unit: g Unit: g 32 40 50 63 80 100 Bore size(mm) Bore (mm) 100 75 50 45 40 35 30 25 20 15 10 5 45 45 19 6 6 6 Both ends tapped 32 598 493 388 367 346 326 305 284 263 243 222 201 175 120 53 53 27 26 Rod end 40 748 628 508 485 462 439 416 393 370 347 323 300 175 120 53 53 27 26 Male thread Rod end male thread 50 1184 996 808 771 735 699 663 626 590 554

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[124.4] 137.8 125.2 62.6 123 110.4 55.2 159.6 147 73.5 157.8 Max. 10 145.2 72.6 53.7 [55.9] 63.5 [65.7] 66.2 [73.2] Approx. 300 (Lead wire length) 59.6 42.1 M8 x 1 (Lead wire length) 69.1 80.4 39.7 55.1 [62.1] Pg7 Approx. 300 87.9 Applicable cable O.D. 3.5 to 7 Note) Refer to page 176 for dimensions of connector types. 3 76 56 4 92 72 5 108 88 6 124 104 7 140 120 8 156 136 9 172 152 10 188

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100