Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

( ) are the dimensions for rotation of 180 and 190.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

In the case of bore size 180 and 200, piston seals are NLP.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

LJ1H

MSM021P1A Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting

10

89 102 114 127 152 177 202 227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230 250 270

Air Slide Table

force [N] Pressing force [N] ST 40, 50 ST 125,150 ST 100 310 0.5/0.67 50 0.5/0.67 190 0.3/0.4 30 0.3/0.4 0 100 200 300 400 0 100 300 200 400 500 Allowable overhang L [mm] Allowable overhang L [mm] MXQ12B-Z OUT side IN side ST 10 to 30 160 0.7/ ST 40, 50 Supply pressure [MPa] ST 75 Pressing force [N] ST 100, 125 110 0.5/0.67 70 0.3/0.4 0 100 200 300 400 Allowable overhang L [mm] Pressing

CM2

201 to 250 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ Bore size (mm) 20 199 190 137 174 165 112 149 140 87 25 203 194 137 178 169 112 153 144 87 32 211 199 139 186 174 114 161 149 89 164 224 236 Built-in One-touch Fittings 40 240 228 163 215 203 138 190 178 113 188 253 265 213 278 290 Clevis Pivot Bracket 1 to 50 51 to 100 151 to 200 201 to 250 101 to 150 Bore size (mm) LY LV LT LP

MB

100 125 164 189 214 150 239 175 200 264 289 125 10 75 27 30 120 130 140 20 40 60 80 100 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic (B) for other dimensions and with rod boot.

smcmaintenancepartslist

differential pressure Element 5 elements included Number of elements Size Filtration area 190 x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 267 Bag Filter Series FGF P.478 2 Replacement Procedure is Replacement Parts and Seal List FGF1 FGF3-40 FGF5-60 Air release Davit for cover Spring washer Nut Air release Fluid release

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motor output [W]/Size [mm] 100/40 200/60 Electric specifications Motor type AC servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) Power consumption [W] Note 5) Horizontal 65 190 Vertical Standby power consumption when operating [W] Note 6) Horizontal 2 2 Vertical Max. instantaneous power consumption [W] Note 7) 445 725 Type Note 8) Non-magnetizing lock Lock

15

. speed = 200 mm/s or less !

Hydraulic

1815 1430 2145 1485 1540 1595 1650 1705 1760 1870 2420 200 3555 2680 4305 2805 2930 3055 3180 3305 3430 3680 4930 344 5195 4075 6155 4235 4395 4555 4715 4875 5035 5355 6955 566 Specific Product Precautions Be sure to read before handling.

Refrigerated Air Dryers

VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

125 135 145 155 165 190 215 22.9 36 M14 x 110l x 120l x 130l x 140l x 150l x 175l x 200l M18 x 135l x 145l x 155l x 165l x 175l x 200l x 225l 110 120 130 140 150 175 200 135 145 155 165 175 200 225 27.7 39 7-6-110 111 Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod Additional Weight (kg) Bore size (mm) 125 140 160, 180, 200 Rod end male thread Male thread 0.31

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.

High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

ISO Cylinder

201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143

Rotary Actuator

100 Rotating angle 90, 180, 100, 190 90, 180, 100, 190 183 Rotary Actuator CRA1 Series 30, 50, 63, 80, 100 Standard type Cushion seal is replaceable.

CQ2

X 175 l -100DC Construction -100DC X 190 l X 200 l Double acting/Single rod Rod end male thread Component Parts Replacement Parts: Seal Kits Bore size (mm) Kit No.