XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

(mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model Data D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8

MHZ

If the workpiece gripping point goes beyond the range limits, this will have an adverse effect on the life of the air gripper. 0.5 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 MHW 50 10 MRHQ 0 10 20 30 40 50 0 50 100 150 Misc.

MHZ

0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Made to Order

M8 x 1.25 28.5 7 41 9 25 6 17 75,100 40.5 88.5 B + Stroke MH + Stroke A + 2 x (Stroke) 5 to 50 40 (50) 88 (98) 40 M10 x 1.25 27 46 7 41 10 25 6 19 32 to 100 75,100 50 98 10 to 50 100.5 (110.5) 40.5 (50.5) MI MM 50 M14 x 1.5 31 57 8 52 13 35 8 24 75,100 110.5 50.5 10 to 50 102 (112) 42 (52) 63 M14 x 1.5 31 68 8 52 13 35 10 24 G 75,100 112 52 10 to 50 125 (135) 51 (61) 80 MA ML MK M20 x 1.5

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Air Cylinder

301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg