2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

CATALOG

10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

Table of Contents

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

A

10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

Made to Order

Dust resistant actuator Bore size (mm) Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.1 MPa 50 to 100 0.1 MPa MGPM Bore size Stroke XC92 Auto switch Suffix Dust resistant actuator Suffix Standard stroke 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 25, 50, 75, 100, 125

Table of Contents

Allowable lateral load (F) Allowable plate rotation torque (T) Torque (Nm) Load (N) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T Load weight m (kg) 10 F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

Hydraulic

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

MG

76 75 100 200 1 20 50 76 75 100 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 30 30 20Data 50, 63 20 20 50, 63 50, 63 32, 40 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 50, 63 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load

Air Cylinder

, 75, 100, 125, 150 1000 25 25, 50, 75, 100, 125, 150, 200 Air cushion Double acting, Single rod Symbol 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

CV/MVGQ

14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) B3 e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 17 81 93 106 131 25 37.5 50 75 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 17 85 97 110 135 25 37.5 50 75 32 36 77 12.5 19 90 102 115 140 25 37.5 50 75 41 46 10-15-

CV/MVGQ

14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5 90 102 115 140 25 37.5 50 75 19 41 46 10-15-

MGP

V = 400m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 25 5 5 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 20 20 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 32, 40 50, 63 10 10 32, 40 5 20 50 76 75 100

10

17 15 190 125 54 50 136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2 38 1/2 120 50 148 148 17 15 223 With Rod Boot [mm] Bore size [mm] d e f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75

MB

, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150,

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

MXQ

displacement amount (mm) 0.020 MXQ12-30 MXQ12-30 MXQ12-100 MXQ12-100 MXQ12-30 MXQ12-100 0.04 MXQ12-100 MXQ12-100 MXQ12-75 MXQ12-75 MXQ12-50 MXQ12-50 MXQ12-40 MXQ12-40 0.08 MXQ12-50 MXQ12-50 MXQ12-50 0.016 MXQ12-50 MXQ12-50 0.03 MXQ12-75 MXQ12-75 MXQ12-40 MXQ12-40 MXQ12-40 MXQ12-75 MXQ12-75 MXQ12-75 0.06 MXQ12-30 MXQ12-30 0.012 MXQ12-40 MXQ12-40 MXQ12-20 MXQ12-20 MXQ12-20 0.02 0.04 0.008 MXQ12

CM2

100, 125, 150 CS1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 C76 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.