Modular F.R.L. Unit

Printed in Japan. 1st printing March, 2003 D-DN P-120 (DN) This catalog is printed on recycled paper with concern for the global environment.

CM2

168 181 206 231 256 25 36 19 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 36 19 32 12.5 25 37.5 50 75 100 125 72 85 97 110 135 160 185 149 162 174 187 212 237 262 40 46 22 41 12.5 25 37.5 50 75 100 125 77 90 102 115 140 165 190 181 194 206 219 244 269 294 Boss-cut Style With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) ZZ Q

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

Compact Type

Printed in Japan. 1st printing June, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Air Cylinder RSQ Series Stopper Cylinder

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

FSQ seies

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting), Option: NS (Name Plate, Silencer)

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: E (Direct Mount Type), Option: NS (Name Plate, Silencer)

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting), Option: BNS (Back Pressure Check Valves, Name Plate, Silencer)

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting), Option: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: E (Direct Mount Type)

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: Name Plate, Silencer, One-touch Fitting: -, CE Compliant: -

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: Direct Mount Type, Option: Name Plate, Silencer, One-touch Fitting: -, CE Compliant: -

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: Back Pressure Check Valves, Name Plate, Silencer, One-touch Fitting: -, CE Compliant: -

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: Built-in Silencer, Direct Exhaust, One-touch Fitting: -, CE Compliant: -