Table of Contents

3 8 (10A) 3.0 VX2240-03 VX2120-02 1.10 6 4.1 0.3 1.1 26.0 VX2340-03 VX2220-02 0.33 7.9 3 0.45 0.33 3.0 VX2250-03 VX2320-02 1.60 8 6.4 0.3 1.6 38.0 VX2350-03 VX2130-02 VX2230-02 VX2360-03 1.0 0.61 15.0 53.0 2.20 4.5 10 11 0.3 2.2 0.46 0.61 2.3 1 4 (8A) VX2330-02 1 2 (15A) VX2360-04 10 11 0.3 2.2 53.0 2.20 0.02 VX2240-02 1.10 6 0.3 1.1 4.1 26.0 VX2340-02 VX2250-02 1.60 8 0.3 1.6 6.4 38.0 VX2350

ZP

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

x 1 m A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Stations VV5F5 05 21 1 VZS VFS 02 2 stations VS4 15 15 stations VQ7 EVS P port VFN R port Bottom ported/Common EXH type Type 40 Applicable solenoid valve VF544Applicable individual EXH spacer assembly DXT156-20-3A Applicable blanking plate assembly DXT156-19-2A Stations VV5F5 05 40 02 2 P port 02 2 stations 10 10 stations R port A, B port 3-4-41 42 Series VF5000 Common EXH: VV5F5-20,

KJ

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

Table of Contents

22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

A port M3 x 0.5 Type 42 Applicable solenoid valve 10-SYJ314M10-SYJ324MHow to Order 10--SS3YJ3-42-05 -M5 Type 42 Type S42 Pilot valve is on the same side of A port. Clean series ( ) Applicable blanking plate assembly SYJ300-10-2A Valve mounting direction Stations 02 2 stations Pilot valve is on the opposite side of A port. Pilot valve is on the same side of A port.

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ZP

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

A

8 -0.025 -0.047 10 5.5 25 39 28 3.2 35.8 42 16 28 47.6 35 46 114 25 11 10 -0.025 -0.047 10 5.5 30 43 33 3.2 39.8 42 20 28 53 40 51 119 32 11 12 -0.032 -0.059 10 6.6 35 54.5 40 4.5 49.4 48 22 28 67.7 40 51 121 40 12 14 -0.032 -0.059 10 6.6 40 65.5 49 4.5 58.4 56 30 30 78.7 50 62 139 50 13 16 -0.032 -0.059 20 9 50 80 60 6 72.4 64 36 36 98.6 58 71 162 63 13 18 -0.032 -0.059 20 11 60 98 74 8

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size P port 1/8 Type 42 (5 port/Base mounted) How to Order Applicable solenoid valve 10-SYJ543-(-Q) 10-SYJ553-(-Q) SS5YJ5 42 05 10 C6 Stations Applicable blanking plate assembly Clean series 02 2 stations Thread type : : -+ -+ A Refer to page 329.

SYJ3000/5000/7000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

4/5 Port Air Operated Valve Series SYJA3000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

VQZ1000/2000/3000

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 35.5 M plug connector (M): VQZ3120 1(R)-M-C6/C8/C10/02 Cover diameter 1.5 Cross section 0.23 mm2 77 (Lead wire length) 300 102.5 66 114 Indicator light 37 <42> < >: AC 2-7-15 Body Ported 16 16 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3220 1(R)-G-C6/C8/C10/02 300

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).