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03 04 06 q Description No.

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

Modular F.R.L. Units

57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/4, 3/8, 1/2 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

smcmaintenancepartslist

AFM30 to AFM40-06 AFD30 to AFD40-06 Model Semi-standard specifications Note 2) Note 3) Note 3) With bowl guard With barb fitting Float type auto drain Bowl material With drain guide AFM20 AFD20 AFM30 AFD30 AFM40 AFD40 AFM40-06 AFD40-06 OUT IN N.C. N.O.

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

SV

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

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3/4 1 Thread type ON-flow range Note 1) IF30 is available for 06.

SYJ300/500/700

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L plug connector (L): VQZ115-L-C3/C4/C6/M5-PR M plug connector (M): VQZ115-M-C3/C4/C6/M5-PR Cover diameter 1.5 Cross section 0.23 mm2 (Lead wire length) 54 <59> 300 Indicator light Indicator light 60.5 <65.5> 300 (Lead wire length) 41 35 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 4-14-8 9 Body Ported 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Body Ported,

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VQ0140-5MO-C4 4 sets (Single solenoid part no.) VQ0240-5MO-C4 4 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQ2PBlanking plug 23 04 06 Please indicate manifold base type, corresponding valve, and option parts.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)