3 Port Air Operated Valve Series SYJA300

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 234 Circular Connector 10-SV Dimensions: Series 10-SV2000 for Circular Connector U D B C4, N3 C6, N7 C8, N9 (R) Stations Cassette base manifold: 10-SS5V2-W16CDWhen P, E port outlets are

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

VQZ1000/2000/3000

mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)-M-C4/C6/M5 36 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 92 103.5 62 Indicator light 37.5 <42.5> < >: AC 2-7-12 13 13 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2220 1(R)-G-C4/C6/M5 300 (Lead wire length) 109.2 54.5 17.3 6 6 R2.5 VQC 3.4 B

Table of Contents

Refer to page 3-13-4.)

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

0.4

fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

SV

10 298 287.5 263.3 17.5 11 310.5 300 279.3 15.5 12 323 312.5 295.3 14 13 335.5 325 311.3 12 14 360.5 350 327.3 16.5 15 373 362.5 343.3 15 16 385.5 375 359.3 13 17 410.5 400 375.3 17.5 18 423 412.5 391.3 16 19 435.5 425 407.3 14 20 448 437.5 423.3 12.5 L1 L2 L3 L4 1-2-60 57 Circular Connector Series SV Dimensions: Series SV1000 for Circular Connector U D B C3, N1 C4, N3 C6, N7 Stations (S

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG