Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

V100

0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5

Smooth Cylinder/Low Speed Cylinder

26 30 10.5 5 8 M8 x 1.25 M20 x 1.5 116 34 8 7 5 6 15 24 62 18 28 13 4 37 60 75 8 41 20 0 0.033 25 33.5 5.5 M10 x 1.25 19.5 17 32 37 10.5 6 8 M26 x 1.5 120 40 10 7 8 15 30 62 22 13 4 41 60 75 8 45 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 32 37 10.5 6 8 M26 x 1.5 122 40 12 7 10 15 64 22 13 4 41 60 75 8 45 26 0 0.039 40 21 47.3 7 M14 x 1.5 21.5 M32 x 2 42.5 46.5 22 41 13.5 8 10 154

Table of Contents

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZJ 3.5 4.5 5 7 8 ZI 6 10 12 16 20 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44

Made to Order

15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 94 M5 x 0.8 M5

Hydraulic

26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28 19 15 143 25 f8 19.5 to 800 32 24 22 38 16 19 12 8 53 8 9 40 7.5 M14 x 1.5 1/8 87 M30 x 1.5 13 36 19 15 159 31 f8 21 to 800 40 24 24 41 18 21 14 11 54 10 11 48 7.5 M16 x 1.5 1/4 108 M33 x 2 19 44 24 21 183 34 f8 21 to 800 Axial foot

CV/MVGQ

hole S + Stroke LS + Stroke ZZ + Stroke A B2 D H2 I AL F K B H LC B1 H1 LD LH LS LT LX LY Bore size (mm) 20 25 32 40 Stroke range Up to 300 13 26 5 8 18 8 28 15.5 13 5 40 41 4 6.8 25 102 3.2 40 70.5 Up to 300 17 32 6 8 22 10 33.5 19.5 13 5.5 47 45 4 6.8 28 102 3.2 40 76.5 Up to 300 17 32 6 8 22 12 37.5 19.5 13 5.5 47 45 4 6.8 28 104 3.2 40 78.8 Up to 300 22 41 8 10 24 14 46.5 21 16 7 54

CV/MVGQ

Up to 300 13 26 30 5 8 20 0 0.033 45 75 60 4 40 7 19.5 13 22 10 70.5 Up to 300 17 32 37 6 8 26 0 0.033 45 75 60 4 40 7 19.5 13 22 12 76.5 Up to 300 17 32 37 6 8 26 0 0.033 50 82 36 66 5 52 7 21 16 24 14 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 116 37 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 41 62 14 22 M26 x 1.5 30 15 M10 x 1.25

Air Cylinder

26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

1

3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A

ZP

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Table of Contents

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15

ZP

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N F M A E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

AC

B110L 35 16 7 B310L 4 Y30L 41 7 11 3.5 45 AC3000 to AC3040 Y20L SAC2000, #13 B210L 40 22 9 B410L 4 Y40L 50 7 14 4.5 50 AC4000 to AC4040 Y30L SAC2503, #13 B310L 40 22 9 B510L 4 Y50L 50 7 14 4.5 60 AC4000-06 to AC4040-06 Y40L SAC4000, #13 B410L AC5000, AC5500, AC6000 Y50L SAC4006, #13 B510L 50 24 12 B610L 4 Y60L 70 10 15 6 62.5 AC5020, AC5520, AC6020 Y60L SAC5000, #13 B610L 1.1-22 Accessories