Table of Contents

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

SQ1000/2000

Approx. 12 EXH outlet 25.5 41.5 62 Approx. 10 1 Stations U side D side 2 3 4 5 6 7 8 n For top ported C10: EXH port C10: SUP port R 3 (58) 39.5 P 1 21 30 48.7 P = 17.5 7.5 2n-C4, C6, C8 (A, B port) C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting L n Formulas: L1 = 17.5n + 46, L2 = 17.5n + 60 n: Stations (maximum 16 stations) Dimensions 16 326 340 362.5 373 15 308.5

VQZ1000/2000/3000

positioning) 3 4 5 3 4 5 L plug connector (L): VQZ1 20 1-L-C3/C4/C6/M5 M plug connector (M): VQZ1 20 1-M-C3/C4/C6/M5 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 119 300 131 55 (Lead wire length) Indicator light Indicator light 61 27.5 <32.5> 34 <39> Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 2-7-11 Body Ported 12 12 Series VQZ1000/2000/3000 Dimensions

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 Station 20 224.5 217.5 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 613 3 Port Pilot Solenoid Valve 10-SYJ300 C4 N3 [ ] for AC Type 42 Manifold: Side Ported/10-SS3YJ3-42Stations -M5, Grommet (G) For M5

3 Port Air Operated Valve Series SYJA300

Valve Rubber Seal Series SYJ300 C4 N3 Type 42R Manifold: Side Ported (External Pilot Type)/SS3YJ3-42RStations -M5, [ ] for AC Grommet (G) For M5 For (Built-in One-touch fitting) C4 N3 33.1 Approx. 300 (Lead wire length) 30.7 + + + + + (Light/Surge voltage suppressor) 12 L1 L2 4 17.5 (4.4) 35.9 Manual override R P V100 11.4 2-4.5 (For mounting) 12 SY 52.9 [55.1] 1/8 (P, R port) 17.5 11.5

Modular F.R.L. Units

12 12 12 12 12 9 Air Combination AC20-B to AC60-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AC40-B AC20-B Nq Body size 20 25 30 40 50 55 60 Symbol Description Nil With drain cock J14 Drain guide 1/8 Drain guide 1/4 W15 Drain cock with barb fitting (for 6 x 4 nylon tube) + i Air filter drain port 13 j Lubricator lubricant exhaust port Nil Without drain

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11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 234 Circular Connector 10-SV Dimensions: Series 10-SV2000 for Circular Connector U D B C4, N3 C6, N7 C8, N9 (R) Stations

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 11 Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [ ] for AC Grommet (G) For M5 C4 N3 For (Built-in one-touch

Compact 5-Port Solenoid Valve

For details, refer to page 135. u A, B port size (Metric/One-touch fitting) Symbol A, B port JSY1000 JSY3000 JSY5000 C2 2 V C4 4 V C6 6 V V C8 8 V C10 10 V C12 12 V CM*1 Straight port, mixed sizes V V V P, E port size (One-touch fittings) 8 10 12 Straight *1 Indicate the sizes on the manifold specification sheet in the case of CM. * The JSY1000 manifold pitch for C2 and C4 is

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-14 15 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 External Pilot VZ300R JIS Symbol VZ31R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

SV

for 12 SV3000 12 02 12 stations 2 stations Specified layout (2) One-touch fitting for 12 (up to 24 solenoids possible.) 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Table of Contents

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.

Intrinsically Safe Valve

() 14 0.75 mm2 L (Lead wire length) 165.1 Max. 10 11 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position double L-type plug connector (L) 53-SY9220-L02 03 106 6.5 Insulator: Black () 18.4 B 2 A 4 Insulator: Red (+) Manual override 3 x 3.2 (Manifold mounting hole) 33.6 64.2 2 x 1/4", 3/8" {4(A), 2(B) port} 46 (E-type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 (12) 2 x 4.4 (Mounting