SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

VQZ1000/2000/3000

seal) (Lead wire length) 23.5 mounting hole 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole VQC 0.8 4 SQ 8.6 17 10 24 SMC SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34 mm2 VQ0 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fitting for 3.2 VQ4 C4: One-touch fitting for 4 Manual override C6: One-touch fitting for 6 M5 : M5 thread VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

3 Port Air Operated Valve Series SYJA300

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 234 Circular Connector 10-SV Dimensions: Series 10-SV2000 for Circular Connector U D B C4, N3 C6, N7 C8, N9 (R) Stations Cassette base manifold: 10-SS5V2-W16CDWhen P, E port outlets are indicated on the U side or D side,

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 Station 20 224.5 217.5 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 613 3 Port Pilot Solenoid Valve 10-SYJ300 C4 N3 [ ] for AC Type 42 Manifold: Side Ported/10-SS3YJ3-42Stations -M5, Grommet (G) For M5

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1

Table of Contents

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Compact 5-Port Solenoid Valve

118.7 125.2 131.7 138.2 144.7 151.2 157.7 164.2 170.7 177.2 183.7 190.2 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 123 135.5 135.5 148 160.5 160.5 173 173 185.5 185.5 198 198 210.5 210.5 223 L4 112.5 125 125 137.5 150 150 162.5 162.5 175 175 187.5 187.5 200 200 212.5 L5 12 15 12 15 18 15 18 14 17 14 17 14 17 14 17 n L 17 18 19 20 21 22 23 24

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

SV

For details, please contact SMC. 1-2-49 46 Series SV Dimensions: Series SV2000 for EX120 Dedicated Output Serial Wiring U D B C4, N3 C6, N7 C8, N9 Cassette base manifold: SS5V2-16S3D(S, R, RS) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-14 15 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 External Pilot VZ300R JIS Symbol VZ31R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

smcmaintenancepartslist

6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 11 Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [ ] for AC Grommet (G) For M5 C4 N3 For (Built-in one-touch

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Table of Contents

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 2.2-15 Series SYJ300 42 Type Manifold: Side Ported/SS3YJ3-42Station -M5, C4 Grommet (G), (H) C4 (Built-in one-touch fitting) (Lead wire length) 29.5 48.5

Proposals for Energy Saving

H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75 x 4 1 x 4 0.75 x 4 0.9 x 8 1 x 4 8 8 10 10 10 12 12 14 14 14 14 14 17 17 17 24.3 24.3 24 24 24 16 16 17 17 17 KNS-08-075-4 KNS-08