VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 2-7-19 Body Ported 20 20 Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12Stations C Grommet (G) 27.5 (11) (35) 44.5 mounting hole n-C3, C4, C6, M5 20 (7.5) DIN rail clamp screw C3: One-touch fittings for 3.2 (5.5) C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread n Manual override 5 4 4 SMC SMC P = 10.5 47 2

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

3 Port Air Operated Valve Series SYJA300

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

189 15 260.5 250 227 20 199.5 16 273 262.5 237.5 21 210 17 285.5 275 248 22 220.5 18 298 287.5 258.5 23 231 19 310.5 300 269 24 241.5 20 310.5 300 279.5 19 252 L1 L2 L3 L4 L5 256 Flat Ribbon Cable Connector 10-SV Dimensions: Series 10-SV2000 for Flat Ribbon Cable Tie-rod base manifold: 10-SS5V2-10 D 1 2 P PG PH U D B C4, N3 C6, N7 C8, N9 (R) (-D) Stations When P, E port outlets are indicated

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 Station 20 224.5 217.5 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 613 3 Port Pilot Solenoid Valve 10-SYJ300 C4 N3 [ ] for AC Type 42 Manifold: Side Ported/10-SS3YJ3-42Stations -M5, Grommet (G) For M5

4/5 Port Air Operated Valve SYJA3000 Series

port With sub-plate M5 3 position closed center Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B)2 4(A) (B)2 4(A) 1 (P) 3(R) 1 (P) (R)3 5(R) How to Order Manifold Base 2 position double 2 position double 4(A) (B)2 4(A) (B)2 Same manifolds as SYJ3000 series are prepared. 5(R) 1 (P) (R)3 3(R) 1 (P) SS5YJA3 Fill the same as SS5YJ3

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

SV

For details, please contact SMC. 1-2-49 46 Series SV Dimensions: Series SV2000 for EX120 Dedicated Output Serial Wiring U D B C4, N3 C6, N7 C8, N9 Cassette base manifold: SS5V2-16S3D(S, R, RS) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

smcmaintenancepartslist

8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 2.2-15 Series SYJ300 42 Type Manifold: Side Ported/SS3YJ3-42Station -M5, C4 Grommet (G), (H) C4 (Built-in one-touch fitting) (Lead wire length) 29.5 48.5

Table of Contents

Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Fieldbus System

, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 (mm) L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11