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ZS-20-5A-50 . 1 pc.

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 2-7-19 Body Ported 20 20 Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12Stations C Grommet (G) 27.5 (11) (35) 44.5 mounting hole n-C3, C4, C6, M5 20 (7.5) DIN rail clamp screw C3: One-touch fittings for 3.2 (5.5) C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread n Manual override 5 4 4 SMC SMC P = 10.5 47 2

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

3 Port Air Operated Valve Series SYJA300

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

S A A : : F G -+ -+ -+ -+ R port Applicable solenoid valve 10-SYJ314M-(-Q) 10-SYJ324M-(-Q) 20 20 stations R P 1/8 A port N NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both

Modular F.R.L. Units

20 20 20 20 20 20 15 The combination of metal bowl: 2 and 8 is not available. 16 When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. 17 For pipe thread type: NPT.

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For details, refer to pages 3-7-19 and 3-7-20.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol Stations Note 02 2 stations Double wiring Note 1) 16 02 16 stations 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P, E port A, B port size (Metric) Symbol A, B port P, E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting

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Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150 160.5 119 137.5 148 108 125 135.5 64 87.5 98 97 125 135.5 53 75 85.5 86 112.5 123 31 50 60.5 75 100 110.5 n L 13 14 15 16 17 18 19 20 21 22

3 Port Solenoid Valve Series SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 one-touch fitting F G R port N3 5/32" one-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

VZ100/300/500

Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Compact 5-Port Solenoid Valve

(Pitch) P=6.5 10PGC (20 pins) 10PHC (10 pins) 24.1 10.2 * These figures show the JJ5SY1-10PC2-05D-C4. * Refer to page 97 for dimensions of external pilot (Made to Order) and silencer. * Only connectors are different for 10PGC and 10PHC.

SV

Pilot type 20 20 stations Internal pilot Internal pilot/Built-in silencer External pilot External pilot/Built-in silencer Nil S R RS A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

ZR

ZF ZP ZCU D1 D2 D3 ZR1 1-K1M18 20 AMJ 10.2 Misc.

SYA3000/5000/7000

(Ventilation hole) 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center / exhaust center / pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 SYA 1/8 (A, B port) SYJA 2 x M5 x 0.8 (Pilot port) VZA VFA 2 x 3.2 (For manifold mounting) VFRA One-touch fitting (A, B port) VA Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" 2 x 3.2 (For mounting

5 Port Air Operated Valve SYA3000/5000/7000 Series

VZA VTA VGA 1/8 (P , EA, EB port) 1.8 (Ventilation hole) Manual override (Non-locking) VPA VPA3 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center / exhaust center / pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 1/8 (A, B port) 2 x M5 x 0.8 (Pilot port) 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.