Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

5 Port Solenoid Valve Series SY3000/5000/7000/9000

C6 Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

SX

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

V

Wiring 08 08 Specs 09 09 Applicable up to 16 Solenoids .. .. Use Manifold Specs Form to 16 16 specify wiring 10 Pole (PH) Connector Symbol Station Note 02 2 Double .. .. Wiring 04 04 Specs 05 05 Applicable up to 8 Solenoids .. .. Use Manifold Specs Form to 08 08 specify wiring 26 Pole (P) Connector Symbol Station Note 02 2 Double .. ..

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol 02 Stations 2 stations Note Double wiring Note 1) A, B port size (Metric) 09 02 9 stations 2 stations P, E port Applicable series Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Specified layout Note 2) 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch

Series SV

For "M" (mixed ports), indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

SV

Note Symbol 02 Stations 2 stations Double wiring specifications (1) 09 02 A, B port size (Metric) 9 stations 2 stations Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series Specified layout (2) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, N3 C6, N7 Foot bracket 10-SY3120-F1 G H C4, N3 C6, N7 Directional Control Valves Air Grippers Modular F.

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

04 9 stations 4 stations 02 02 2 stations 2 stations Specified layout (Up to 9 solenoids possible) Specified layout (Up to 19 solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36

Table of Contents

(VJ3133) Air operated VJA3130 0.245 0.213 0.194 0.187 0.174 0.184 0.214 K2 K3 C1 C2 C3 C4 Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) Air operated VJA3130 N.C. (VJ3133) N.C. (VJ3133) Double SOL. (VJ3233-X18) How to Order Refer to page 13-3-34 for further part no. information.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting