Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

SZ3000

Size and weight reduced by eliminating the manifold base C4/C6 One-touch fitting C4/C6 One-touch fitting (Elbow type) SZ3000 Series Height 31% reduction (Compared with SX3000-45 with DIN rail manifold and 5 stations) FREE LOCK Weight 12% reduction M5 port block assembly A port 1-3-1 B port 2 Series SZ3000 Precautions 1 Be sure to read before handling.

SQ1000/2000

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

LEC-OM02904

C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MBW40-PS MBW50-PS MBW63-PS MBW80-PS MBW100-PS #8 #9 40 Piston seal NBR Rod seal A NBR Set of left nos. #8, #9, $2, $4 Rod seal B NBR 41 $2 43 $4 45 Release piston seal NBR 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit.

4/5 Port Air Operated Valve Series SYJA3000 1

) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2-1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 5-2-21 4 4/5 Port Air Operated Valve Series SYJA5000 How to Order A, B port size Bracket One-touch fitting for 6 C6 One-touch fitting for 4 M5 x 0.8 C4

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

HRX-OM-X084

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms which allow to continue pump operation Display Alarms which allow to Alarm no.

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

2

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4

Table of Contents

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Air Fittings & Tubing

(inch) Min. hole dia. (1) Fitting size d (inch) D1 D2 M A L2 L1 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 9.6 7 10 10 8 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5 26 26.5 35.5 36.5 39.5 40.5 41.5 43 16 18 10.4

KJ

Please consult with SMC for availability. 15-4-43

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

TABLE OF CONTENTS

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR

Speed Controller with One-touch Fitting

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4