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> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

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stroke 6mm(for f2~rj>8) 20-0120 F Fluorine rubber K10-Non-fOtation type with buffer stroke 1Omm(for rj>10~rj>SO) 25-25 B Bellows type *GN-Electric NBR(2.16) 32-"32 ~'GS ~ Electric silicon rubber('2--416) 40-40 *20 or more:Special order 50-50 LisiO Pad Dia Pad Type Listf} Vacuum Entry Mounting 4 Nylon tube N4 6 Nylon tube N6 -el!'

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VT VP How to Order Manifold Assembly (Example) VG VP D side U side 1 3 4 5 Stations VQ VQZ215-5L 4set VQZ 2 VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-5 1 set (Blank plate assembly) VQZ215-5L 4 sets (Single solenoid) VZ VS Prefix "" mark to valves etc.to be assembled on the manifold. Write sequentially from the 1st station on the D side.

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v rr super@mpacl lype (z) 4For non-sla.dard stroke engh nquvrthSrvlc 5l nimum slroke forallosqtch 0pe s0 25 Feferto Cataog CAI BD20 IAlorderars f \ Bole Sizes: l2mm, l6mm,2omm, 25mm, 32mm, 4omm, 5omm, 63mm 8omm, lOOmm, l25mmr l4omm, l6omm, l8omm,2OOmm Wmr8m&$m s . The industry's most comprehensive line ol compact cylinders . Compact, lightweight and space-saving design .

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

SX

N7 N3 N7 N9 N9 N11 SX3000 SX5000 SX7000 1-6-17 Body Ported 18 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position single Grommet (G), (H): SX3120(-F2) Foot bracket SX3120-F1 G H C4 C6 G H C4 C6 2-M3 x 0.5 thread depth 3.5 (Mounting hole) (For mounting bracket) (Light/Surge voltage suppressor) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Courtesy of Steven Engineering

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP How to Order Valve Manifold Assembly (Example) VG U side D side 1 3 Stations 2 VP S070 VQZ215-5L 4 sets VQ VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-51 set (Blanking plate assembly) VQZ215-5L4 sets (N.C. type part no.)

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Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Electric Actuators

General purpose input/output connector: CN2 LJ1 LG1 LC1 LX LC6D/LC6C Switches Controller model Mounting screw Mounting bracket assembly M3 x 0.5 LC1-1-N3 LC1-1-N3 Power terminal: TB M5 x 0.8 LC1-1-N5 LC1-1-N5 M3 LC1-1-L3 LC1-1-L3 M5 LC1-1-L5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command

Intrinsically Safe Valve

) Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 L (Lead wire length) 104 Terminal type (TT) 53-SY5120-TT-01 (-F2) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 L (Lead wire length) 120.8 Max. 10 5 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 22.6 2 A B C 16.7 53-SY5 20-L-01 (-F2) 2 x M3 x

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.