Aluminum High Vacuum Angle Valve Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS For details, consult your SMC sales representative.
Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed Technologies, Inc.
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum
We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar
Applicable solenoid valve SYJ314, SYJ314M SYJ324, SYJ324M VQD Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused "R" port at the end of the manifold. Seal the unused "R" port at the end of the manifold. VZS VFS VS eSS5YJ3-41, -S41 The 3 port valve can be used on the 4 port manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)
Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10-SYJ314
to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-4 5 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm2) M8 connector L/M plug connector Grommet SYJ312 SYJ322 SYJ314
to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-4 5 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm2) M8 connector L/M plug connector Grommet SYJ312 SYJ322 SYJ314
of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (101psi) (high pressure type 1.0MPa) (145psi) 0.1MPa (14psi) Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (high pressure type 1.0MPa) 0.1MPa Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
SYJ314 N.C. 52 (Without sub-plate 31) 50 (Without sub-plate 29) Base mounted type (With sub-plate) M5 0.8 1.8 (0.1) SYJ324 N.O.
Made to Order Made to Order (For details, refer to pages 57 through 58.) 1 Series SYJ300 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm2) M8 connector L/M plug connector Grommet SYJ312 SYJ322 SYJ314 SYJ324 Body ported N.C. 0.41 0.36 0.18 0.31
Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (high pressure type 1.0MPa) 0.1MPa Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
solenoid valve Series SY100, SYJ Can be used at 100 kPa vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314
Type of Actuation: 3 Position Closed Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/o Sub-plate, Thread: NPT
Function: 3 Position Closed Center, Piping: Base Mounted, Exhaust: Individual, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Non Plug-in w/o Sub-plate (or Plug-in Type), Thread: NPT, Option: -
Function: 2 Position Single, Piping: Base Mounted, Exhaust: Individual, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Non Plug-in w/o Sub-plate (or Plug-in Type), Thread: NPT, Option: -
Function: 2 Position Single, Piping: Base Mounted w/Metering Valve, Exhaust: Common, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Non Plug-in w/o Sub-plate (or Plug-in Type), Thread: NPT, Option: -