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Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

Series VQ Metal Seal/Rubber Seal Body Ported

M5 C4 IN side port size OUT side port size Option None With blacket F C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 DIN rail mounting (for manifold) D N Name plate Note) When specifying more than one option, please list alphabetically.

Stroke Reading Cylinder and Counter

24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

CE

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

CE

Mounting style B L F 12 mm equivalent S 1 pc.

CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

HRL

Terminal resistance Terminal resistance Circuit diagram SD+ SD SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG Master This product This product This product (1st slave) (2nd slave) (31st slave) Do not connect with other pins.

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

VQ4000

Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rubber back of the belt is softened and sticky f.

HRX-OM-X084

Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3-8 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

HRX-OM-W002

Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3-7 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

HRX-OM-X071

Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3-11 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override