4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

PSxx-OML0002CN

F 0] [F] 2 2 [F][-] [F 0] 26 ISE30A MPa ""M ZSE30A(F) kPa ISE30A P ZSE30A(F) psi [F 1] OUT1 27 ONOFF ISE30A0.500 MPa ZSE30A-50.5 kPa ZSE30AF50.0 kPa ISE30A0.050 MPa ZSE30A5.1 kPa ZSE30AF5.0 kPa ON OFF -24No.PS-OML0002CN-G [F 2] OUT2 30 [F 1]OUT1 OUT1 [F 3] 30 2.5 ms [F 4] 31 1000 [F 5] 32 [F 6] 34 0 [F 7] 35 OFF [F 8] 36 OFF [F90] 37 OFF [F97] 39 OFF [F98] 41 [F99] 43

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Power saver Cylinder ports (Base mounted only) Rated voltage M5 C4 M5 thread 4 One-touch fitting 5 6 24V DC 12V DC 1(P), 3(R) port: Rc(PT)1/8 Note) Consult SMC for other voltages. How to Order Manifold Assembly Electrical entry Specify the model numbers of valve and option together with the manifold base part number.

Shock Absorbers and Rate Controls

4 f f i .

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

IIIIIII

P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

Table of Contents

Bore size (mm) 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 GP > 0.5 Calculation of load ratio to the theoretical output of cylinder = f / F Horizontal mounting: f = x W Inclined mounting: f = x Wcos + Wsin (Refer to the figure on the right.)

ZSE30A(F)/ISE30A

(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

Digital Flow Switches, Series PF2A, Series PF2W

B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50msec 2 + 24VDC Load DOWN MODE SET U P 3 Blue 2-G C 60 PF2A7H-(-M) 28 29 (41.5) 3 4 Accumulated pulse output Brown 1 ON OFF OUT1 4 Black Analog output Load 2 1 50msec 2 + White Connector pin numbers Load 24VDC 3 Blue Pin no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

PA3000/5000/PAX1000

N T, F, N are order made specifications.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

Digital Flow Switch

(Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A7 0) 2% F .S. (PF2A7 1) 1% F.S. (Fluid: Dry air) Monitor unit 1% F.S. 1% F.S. (Fluid: Dry air) Monitor unit Monitor unit Monitor unit 0.1% F.S. 1% F.S. 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.5% F.S.

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.