Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

IIIIIII

P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

Table of Contents

Bore size (mm) 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 GP > 0.5 Calculation of load ratio to the theoretical output of cylinder = f / F Horizontal mounting: f = x W Inclined mounting: f = x Wcos + Wsin (Refer to the figure on the right.)

ZSE30A(F)/ISE30A

(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

Digital Flow Switches, Series PF2A, Series PF2W

B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50msec 2 + 24VDC Load DOWN MODE SET U P 3 Blue 2-G C 60 PF2A7H-(-M) 28 29 (41.5) 3 4 Accumulated pulse output Brown 1 ON OFF OUT1 4 Black Analog output Load 2 1 50msec 2 + White Connector pin numbers Load 24VDC 3 Blue Pin no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

PA3000/5000/PAX1000

N T, F, N are order made specifications.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

Proposals for Energy Saving

Thread type Nil Rc T NPTF F G N NPT Refer to Table 1 below for applicability.

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

Digital Flow Switch

(Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A7 0) 2% F .S. (PF2A7 1) 1% F.S. (Fluid: Dry air) Monitor unit 1% F.S. 1% F.S. (Fluid: Dry air) Monitor unit Monitor unit Monitor unit 0.1% F.S. 1% F.S. 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.5% F.S.

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

Vacuum

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