Series AK1000

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Series AP3500

The connection may be a 1/8 inch NPT female thread or 10-32 female thread or M5 depending on the valve model. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1. If a valve requires repair, contact SMC. Operation (Air operate type) Warning 1.

Process Gas Diaphragm Valve

A Connections: TW Connections: TW 1.0 (25.4) 1.0 (25.4) 45 45 AP SL M5 x 0.8 depth 0.25 (6.4) (Mounting hole) M5 x 0.8 depth 0.25 (6.4) (Mounting hole) AZ AZ AK Note) MV6 is bar stock body.

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

SX

ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

SZ3000

M5: M5 x 0.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 (EA) 1 (P) 3 (EB) J: With switch 3 position closed center A 4 (A) 4 (B) 2 Back pressure check valve 3 2 B Nil K None 5 (EA) 1 (P) 3 (EB) Built-in ON OFF SMC Elbow fitting assembly (Upward) L4: 4 elbow

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) J: With switch 3 position closed center A 4 Back pressure check valve (A) 4 (B) 2 3 2 B Built-in Nil K None 5 (EA) 1 (P) 3 (EB) ON OFF The built-in back pressure check valve type has an effective area approximately 20% smaller. The 3 position closed center and 3 position pressure center are not available with back pressure check valve.

Series SV

Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V 0V 0V 24V The example above uses a dedicated S-LINK flat ribbon cable SL-RCM00.

Table of Contents

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

Table of Contents

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

Vacuum System Peripherals:

(Types without unit conversion function are fixed to the Sl units (KPa or MPa).)

Series AP3100

The connection may be a 1/8 inch NPT female thread or 10-32 female thread or M5 depending on the valve model. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1. If a valve requires repair, contact SMC. Operation (Air operate type) Warning 1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

-fl Seies

3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

ZP

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

CATALOG

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

•

M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.