AKH/AKB Series

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

AKH/AKB Series Check Valve with One-touch Fitting

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

VCC

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

CATALOG

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Table of Contents

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position closed center 54 (28) SYJA3440-M5 3 Position exhaust center SYJA3540-M5 3 Position pressure center SYJA3130 22 4 Port base mounted type (For manifold) 2 Position single SYJA3230 25 2 Position double Note1) Note1) M3 0.5 M5 0.8 1.2 (0.067) M3 0.5 SYJA3330 3 Position

V

-04 4 M5x0.8 8 9.5 9.6 22.8 27.6 11.1 31.4 28.6 27.7 24.9 13 8 ASV220F-M5-06 6 M5x0.8 8 11.5 9.6 23.9 28.7 11.1 31.4 28.6 27.7 24.9 14 9 * Assembled height (N)ASV 0 F B O D Y S I Z E 1 M3 2 M5 3 18 4 14 5 38 D I M E N S I O N S S E R I E S (N)ASV T E E T Y P E S Y M B O L S W I T H B U I LTI N S I L E N C E R B O D Y T Y P E 1 Tee 2 Elbow P O R T T H R E A D M3 M3x0.5 M5 M5x0.8 01 1/8

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

•

M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

Series SY100 3 Port Solenoid Valve Rubber Seal

Add 1g for AC.

Series SV

Tightening of fittings When connecting fittings, etc., to valves, tighten as indicated below. 1) M5 type 1. When using SMC fittings, follow the guidelines below. M5: After tightening by hand, tighten an additional 1/6 turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

LEC-OM07605CN

b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Lubrication Equipment

1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-50D, 63D 4-5.1, counter bore dia. 9.5 Counter bore depth SC (mounting hole) RA AA 6.4 AB AC 35 35 RA 5 VA, depth VB YC RB RB NA B XA, depth XB NB Q 4-M6 x 1, thread depth 12 (mounting threads) O 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth WB 4-M5 x 0.8, thread depth 10 Attachment mounting threads CB CA M5 x 0.8 (finger opening port)