CATALOG

www.stevenengineering.com I 2.23 SOLENOID VALVES SERIES VQ0 H O W T O O R D E R B A S E M O U N T E D T Y P E V A L V E S I N G L E U N I T V Q 0 0 0 0 5 VQ 0 L 1 5 0 C4 S U B P L AT E SUPC Y L I N D E R P O R T S .Without subplate C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 M5 M5 (10-32Nom) N1 One Touch Fitting 1/8 N3 One Touch Fitting 5/32 S E R I E S VQ0 C O N F I G U R

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

V

www.stevenengineering.com I 2.23 SOLENOID VALVES SERIES VQ0 H O W T O O R D E R B A S E M O U N T E D T Y P E V A L V E S I N G L E U N I T V Q 0 0 0 0 5 VQ 0 L 1 5 0 C4 S U B P L AT E SUPC Y L I N D E R P O R T S .Without subplate C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 M5 M5 (10-32Nom) N1 One Touch Fitting 1/8 N3 One Touch Fitting 5/32 S E R I E S VQ0 C O N F I G U R

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

SZ3000

External power supply 24VDC10% Q DeviceNet compatible: OMRON Corp.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tubing O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SX

SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 SX5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" SX5000-50-1A-C6 SX3000-50-1AManifold block assembly q (Inch size) N3: With One-touch fitting for 5/

VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

SV

Manifold Specifications SV1000 SV2000 SV3000 SV4000 Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids Tie-rod base manifold Common SUP, EXH 20 stations 32 points 1(P), 3/5(E) port C8, N9 C3, C4, C6 N1, N3, N7 C10, N11 C4, C6, C8 N3, N7, N9 C12, N11 C6, C8, C10 N7, N9, N11 C12, N11, 03 C8, C10, C12 N9, N11, 02, 03 Port size 4(A)