Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: U (Indicator Light w/Surge Suppressor Non-polar), Manual Override: None, Port Size: C4 (ø4 One-touch Fitting), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: U (Indicator Light w/Surge Suppressor Non-polar), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type

1

SY 3 5 1 C6 1 0 3 SY q w r e t y u i o !0 !1 !2 !3 EX600 Top ported VM q Series u Coil type !

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

Compact 5-Port Solenoid Valve

Internal Pilot How to Order Manifolds JJ5SY 3 10S Q 1 A 05 U C6 Made to Order (Refer to page 135 for details.)

CATALOG

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E210 & N320 1.123 LINEAR ACTUATOR: COMPACT CYLINDER SERIES NCQ2/CQ2 A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 S I N G L E R O D C L E V I S ( R O D E Y E ) A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S ( R O D E Y E ) CQ2 SINGLE ROD

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Table of Contents

0, Metal joint q, w, O-ring t, y, u Terminal i, Junction cover o, Adaptor plate, Pin housing, Guide AXT625-20A(2) 1 2 C6 C8 Plug-in type Manifold block assembly (1) !0 1 2 C6 C8 AXT625-10A(3) Manifold block !0, Metal joint q, w, O-ring t, y, u Non plug-in type Plug-in type With terminal block (3) For 01T 01T1 AXT625-2A-20 End plate (U side) assembly End plate (U) !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 0 08 C6 1 T 10 CE compliant CE compliant Nil Q Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 0 08 C6 1 T 10 CE compliant CE compliant Nil Q Note) For CE compliant models, DC-type only.

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Local Area: (800) 258-9200-www.stevenengineering.com VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1/4 1/4 1/4 VZ52 Note) Value at manifold base mounted, 2 position

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

V

H O W T O O R D E R S E R I E S V Q Z C O M P A C T B O D Y T Y P E M A N I F O L D MANIFOLD OPTIONS FOR VQZ1000/2000/3000: BLANK PLATE ASSEMBLY INDIVIDUAL SUP SPACER INDIVIDUAL EXH SPACER PORT PLUG V V 5 Q Z 2 5 C C SERIES 2 . . . . .VQZ2000 PORT SIZE {4(A), 2 (B) PORT} C3 . . . .One Touch Fitting 3.2 C4 . . . .One Touch Fitting 4 C6 . . . .One Touch Fitting 6 01 . . . .Rc(PT)1/8 MANIFOLD

VFR

0, Metal joint q, w, O-ring t, y, u Terminal i, Junction cover o, Adaptor plate, Pin housing, Guide AXT625-20A(2) 1 2 C6 C8 Plug-in type Manifold block assembly (1) !0 1 2 C6 C8 AXT625-10A(3) Manifold block !0, Metal joint q, w, O-ring t, y, u Non plug-in type Plug-in type With terminal block (3) For 01T 01T1 AXT625-2A-20 End plate (U side) assembly End plate (U) !

SZ3000

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

0.4

One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 4.5 2 x M4 mounting hole 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n U side D side ( 9.5)