2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

F G(PF) Dust Tight/Jet Proof (IP65) Optional IP65 model is available on valves with DIN connector electrical entry. How to Order Valve (Applicable to VQZ2000/3000 rubber seal) VQZ3151 5YZB 03 W IP65 rated No (Standard) (1) IP65 reted W Note 1) The pilot exhaust of the IP65 valves is common with main valve exhaust.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Vacuum Ejector with Solid State Timer

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

0.3 m lead wire LZ L plug connector, with 0.3 m lead wire, with light/surge voltage suppressor LN L plug connector, without lead wire (applicable to DC) LO L plug connector, without connector Standard supply pressure H M 0.5 MPa 0.35 MPa (Except nozzle diameter 05 type) Thread type Rated voltage Nil T NPTF Rc 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC F

Multistage Ejector (N)ZL Series

Exhaust specifications For E (ZSE4) EB (ZSE4B) Built-in silencer Port exhaust Nil P 25 26 65 27 26 67 Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Lead wire length 0.5 (2.9)m Exhaust port thread specification (port exhaust only) Lead wire length 0.5 (2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F

Multistage Ejector Series ZL

Exhaust specifications Built-in silencer Port exhaust Nil P For E (ZSE4) EB (ZSE4B) 25 26 65 27 26 67 Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Lead wire length 0.5 (2.9)m Exhaust port thread specification (port exhaust only) Lead wire length 0.5 (2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F

VQZ100/200/300

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

VQ

How to Order Valve VQ1 1 0 5 F Manual override Series VQ Compact 3 port valve Non-locking push flush style Locking slotted style B : Option Actuation 1 2 Normally closed Normally open Electrical entry Plug-in style With indicator light and surge voltage suppressor (Only for plug-in manifold) F Functions Standard (1W) High pressure (1.5W) Low wattage (0.5W) Large flow capacity H Y U Coil

Process Pump <Fluororesin Type> Series PA3000

Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot Air

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF), Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: Rc, Bracket: F (Bracket)

Function: Normally Closed, Piping: Body Ported, Body Option: Individual EXH, Specifications: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Body Ported 1/8, Thread: NPTF, Bracket: Bracket, CE-Compliant: -

AXTS-OMY0007

Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.

ZB-OM00301

15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N