ZSE30A(F)/ISE30A For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.
2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2
HOW TO ORDER x x T I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04 4 kgf/cm'?
M typo plug connctor/t{VZ512O.OMOO.01T lngttr 0.13(3.2) DL6 : _ .l : With indicator lisht and su.ge voltage suppressor @ NVZ5000 BodU Portpd lUpe / 2 Position Sitryle Solenoid inch(mm) G.ommet/lnfi Z522GOGOO-01 T t{rzs22GOHOO.{tlT Dlll cornec{o. (D)/ itv:zszar-oDoG01T o.r3(32) Dia 2Mounting hol3 5 .g g I I lc32Nom.
M typo plug connctor/t{VZ512O.OMOO.01T lngttr 0.13(3.2) DL6 : _ .l : With indicator lisht and su.ge voltage suppressor @ NVZ5000 BodU Portpd lUpe / 2 Position Sitryle Solenoid inch(mm) G.ommet/lnfi Z522GOGOO-01 T t{rzs22GOHOO.{tlT Dlll cornec{o. (D)/ itv:zszar-oDoG01T o.r3(32) Dia 2Mounting hol3 5 .g g I I lc32Nom.
Model: H (Male Connector), Tube Size: 10 (Ø10), Connection Thread: G02 (1/4G)
PIPE BUSHING HEX 3/4-1/4G, SS. 30.00000 lb. 977.
Please contact us for the latest version.sales@ocaire.com, ModelP (Piping port) NilTNTFRS1H80Rc 1/4NPT 1/4G 1/4
Please contact us for the latest version.sales@ocaire.com, ModelP (Piping port) NilTNTFRS1H63Rc 1/4NPT 1/4G 1/4
Please contact us for the latest version.sales@ocaire.com, ModelP (Piping port) NilTNTFRS1H80Rc 1/4NPT 1/4G 1/4
Max. flow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch fitting type Specifications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating
Size/Port: 4G [One-touch Fitting Type, Applicable Tube OD: ø6, Flow: 65 L/min (ANR)]
OOther oil-free applicalioos. 4g,tc' SMC Pneumatics, Inc. glrc' Super Mist-Separator NAIIIE Series '# . Rdnove8 viftrdv a[ parlides llger than 0.Olpm. r Sp*id Color Charuang activabd ca6on lernent alovus viilal lm.ibil ddflint lite . ldse cil nist absordion c*tility, 10 lines sbnbd podrcts, . Plovid6 s.?erkr filfaRm br dst rofi!
@silrrc I SERIES NCJ2 Standard Type: Double Acting/Double Rod Symbol Double acting/Double rod -++T-T Auto switch specification Relay Sequence controller lC Circuit Calculalion (Enmple) NCJ2WLl 0-050 .Bas c weighr-1.23 o, (610) .AdditioMl weight --.17 oz (clindr strcke--1,') .Mountins brackr wgighr--.4g oz (Foot lyps] 1.23 +.17 +.49 = 1,89 oz @srrc SERIES NCJ2 Standard Type: Double Acting
/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G
Model: Hexagon Socket Head Male Connector, Tube Size: Ø8, Connection Thread: 1/4G
Model: Male Elbow, Tube Size: Ø8, Connection Thread: 1/4G
Model: Male Branch Tee, Tube Size: Ø10, Connection Thread: 1/4G
Model: Male Branch Tee, Tube Size: Ø6, Connection Thread: 1/4G
Model: Hexagon Socket Head Male Connector, Tube Size: Ø10, Connection Thread: 1/4G