SMC Corporation of America
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Pressure Primary pressure normal Primary pressure drop Primary pressure increase Set values P1 P2 Time ON Switch output 1, 2 OFF Time [ ] 5ms or more 10ms or less Switch output response time when auto shift is input.

ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

(RD)((2)) (RY(n1)ARY(n3)A) (2) (RYn0) ON(RYn0) (22.5s) OFF ON ON(RYn0) (RY(n 1)A RY(n3)A) RD OFF ON 10ms 10ms 95ms (RYn0) OFF ON 95ms (RY(n1)A RY(n3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms OFF ON (RD) 4 8 4 (3) EMGEMG (E6) (EMG) (RYn1)(RYn2) RYn1RYn2 DC24V DICOM () DOCOM EMG .4.8.3 4 9 4 4.3.3 CNP1CNP2CNP3 13.913.1 CNP1CNP2CNP3 (1) LECSC(A) () CNP1 CNP1 54928-0670(Molex) 54928

4 ) ,20 20 (31 ) 5 ,,31 ( ,No.) ,(),S.STOP , (RS-232C BCD ) ,,RS-232CBCD (,,, ,) (/) RS-232C RS-232C ,PLC(RS-232C )CEU5 BCD (CEU5*B-*) BCD PLC , 6 - 4 CEU5 CEU5-D CEU5P CEU5P-D CEU5B CEU5B-D CEU5PB CEU5PB-D (DIN ) ,, LCD() 6 (),(/) 2ROM(80 ,:E2FUL)} {} {E ,() 90/UPDOWN (*1) 100kHz (*2) GND (COM DC12/24V ) DC12/24V (COM GND ) DC 12V10 %,60mA , , BCD //(100ms) 5 / 5ms

D-J51 is 5ms or less. Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms

N.C. 0.55MPa 0.1MPa 0.55MPa 0.55MPa 0.1MPa -0.1MPa 0.1MPa 0MPa 5ms 5ms 5ms ON3.5ms OFF2ms DC24 0.7W29mA2 0.7W29mA2 1W42mA 1W42mA DC12 0.7W29mA2 0.7W58mA2 1W83mA 1W42mA L M 3 10.30.4 23.1W10ms 0.7W 3/M 32 - No.ZB-OM00301 1 03M 04M 05M 06H N.C. N.C. N.C. N.C.

ASin ooo1 C_5 5ms ASino.r1 ( ) C_5(44 ) C_5 -105.0105.0 kPa -210210.0 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -41No.PS-OMU0005CN-C [F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] (

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms

) 200Hz (5ms) 200Hz (5ms) (not analog output model) (not analog output model) (not analog output model) Differential (NOTE 1) min 3 units of display min 3 units of display min 3 units of display (not analog output model) (not analog output model) (not analog output model) Fluid Air, inert gas Air, inert gas Air, inert gas Temperature Characteristics +-3% F.S +-3% F.S +-3% F.S Repeatable Accuracy

) 200Hz (5ms) 200Hz (5ms) (not analog output model) (not analog output model) (not analog output model) Differential (NOTE 1) min 3 units of display min 3 units of display min 3 units of display (not analog output model) (not analog output model) (not analog output model) Fluid Air, inert gas Air, inert gas Air, inert gas Temperature Characteristics +-3% F.S +-3% F.S +-3% F.S Repeatable Accuracy

or less 6.5 or less 5ms or less 5ms or less Response time (2) 1W (42mA) 0.7W (29mA) (3) 1W (42mA) 24V DC 1W (83mA) 0.7W (29mA) (3) 1W (83mA) 12V DC Clean Series Power consumption (Current) 0.6VA (6mA) 0.5VA (5mA) 100V AC Clean series is available for both standard and option specifications. 0.55VA (5mA) 0.65VA (5.9mA) 110V AC 1.0VA (5mA) 1.2VA (6mA) 200V AC How to Order Valve 10-VQ110l-l

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire) DIGITAL FLOW SWITCH. Flow Sensor for Air. 10.00000 lb. F29.

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .22312 lb

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Response time with respect to controller input signals Timing for alarm reset ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.