Tank Volume: 20 [0.71 ft³ (20 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 20 [0.71 ft³ (20 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 20 [0.71 ft³ (20 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 05 [0.18 ft³ (5 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 10 [0.35 ft³ (10 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 20 [0.71 ft³ (20 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 10 [0.35 ft³ (10 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 05 [0.18 ft³ (5 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Tank Volume: 10 [0.35 ft³ (10 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: NPT, Drain Valve: Drain Valve, Tank Capacity: -, Material: -

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

15

Operate it at a full stroke at least once a day or ev ery a thousand cycles. If an external force over the allowable moment is applied, it may cause play in the guide or an increase in the sliding resis tance. 6. Keep the flatness of mounting surface should be within 0.1 mm/500 mm.

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Proposals for Energy Saving

ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD with back light LCD LED -101 to 10kPa (-760 to 75mmHg) 200kPa OUT1: Green OUT2: Red Indicator light (lights up when ON) Green Response frequency 200Hz (5ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Air,

Multistage Ejector (N)ZL Series

(full span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light