Model: 3 (VDW30), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: L2 (90° Left Direction), Orifice Diameter: 3 (3.0 mm), Port Connection Type: P7 (P7 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: K (With 2 Quick Fastener Clips)

ZP

Hexagon width across flats 12 Hexagon width across flats G 1 8 Model A 1 8 B C F: M5 x 0.8 F: M6 x 1 F: Rc K L Y E B C F: M6 x 1 F: M8 x 1.25 F: Rc K L Y D Model A E D G E D G E D G D D ZPT40B ZPT50B 34 6 8 6.2 38 5.5 5.5 13.8 10 13 12 15 5 8 16 25 25 31 40 50 43 53 51.5 47.5 32.4 19 24.4 16 48 57 ZPT10B 29 6 8 29 6.2 12 35 8.7 7.5 9.9 8.5 18.5 27.5 27.5 33.5 19 ZPT13B 16 18 20 ZPT16B 21

ZP

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

Made to Order

Caution 1. Use a shock absorber, etc.

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

NCA1

D across flats C BA NCM KK NCA EA MM B DR E -X AA 20G J TF F UF LF + Stroke WF Data XF + Stroke A ZF + Stroke MM KK E A AA B BA C D EA EE F FB G J R TF UF WF Y P XF ZF Bore size (in) 150 (1.5") 2 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 5/8 5 200 (2") 5/8 2 1/2 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3

NCA1

A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71 7.44 2.36 1.30 9.44 5.56 200 (2") 5/8 7/16-20 3/4 2.60 1 1/8 3/

CATALOG

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

A

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

CEx-OMQ0013

CE2/CEU2 / / *3) 1 1.5 3)1 1 () 4. 1. , a. 060 5. b. 2585%RH c. d e. 6. f. g. ( ) h. i. 7. j. k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5.

NCA1

1 1/2 1 1/2 1/2 7/8 3/8-24 4.5 0 1/2 1/2 7/16 1.57 1.18 3.32 5 7/16 6 1.4 3.4 1 3/8 2.34 4 1/4 2.72 5 53/64 Rear Flange Type NC A1G (MF2 Mounting Style) (in) Bore (in) MM KK A AA B BA C D DD E EA EE F FB G J R TF UF WF Y P XF ZF 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 5/8 5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 1 1

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

rep-modular-e

Then, tighten the screws completely in a diagonal pattern with the indicated tightening torque. 2.15 0.3 Nm 2.35 0.3 Nm 2.35 0.3 Nm 3.5 0.3 Nm 4.5 1 Nm 4.5 1 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) Phillips head screw driver 406 Series AR(K) Replacement Procedure of Diaphragm 2 2.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Then, tighten the screws completely in a diagonal pattern with the indicated tightening torque. 2.15 0.3 Nm 2.35 0.3 Nm 2.35 0.3 Nm 3.5 0.3 Nm 4.5 1 Nm 4.5 1 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) Phillips head screw driver 406 Series AR(K) Replacement Procedure of Diaphragm 2 2.

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

MY1

53 Section Za detail (Adjustable range) Q P Section Za detail (3/1) Adjustable range 12 Zb JJ 6 5 3.5 K Zb M4 x 0.7 H 1 1 A L 2 x 2-LD 8.5 28.5 Section Zb detail (Adjustable range) Section Zb detail (3/1) Adjustable range (mm) 2 x 2-6.5 A 45 55 B 45 52 C D 30 35 F 52 59 G 38 50 H 18 21 Model MY-J16 MY-J20 Applicable bore size MY1B16 MY1B20 22.5 26 JJ M4 x 0.7 M4 x 0.7 K 10 10 LD 6 6 L 4

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side