F/ISE Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
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Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock
N femals 1/4 NPT NOTE: 1.
fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch
Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard
Max. flow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch fitting type Specifications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating
Series: 350 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: N (NPT)
Series: 350 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)
This is a legacy product, and replaced byVFN2120N-5DB-02N VFS2000 SOL VALVE 4/5 PORT. VALVE, NAMUR INTERFACE, S/SOL. VALVE. VFS2000 BODY PT 1/4NPT (F). 0.61729 lb. EA.
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)