Thermo-chiller/Rack Mount Type

Standard EIA standards, RS-232C (ASCII mode/RTU mode) RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Be sure to wire to the correct pin numbers according to the diagram. 5 1 9 6 D-sub 9-pin female (socket) type Communication connector 31 HRR Series Options Options have to be selected when ordering the thermo-chiller.

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

Title not found

JOG and constant rate movement, return to origin, test operation and testing of compulsory output can be performed. 27 Series LEC Teaching Box/LEC-T1 How to Order LEC T1 3 J G Enable switch (Option) Teaching box Enable switch S None Equipped with enable switch Nil Cable length 3 3 m Interlock switch for jog test function Stop switch Initial language J E Japanese English Stop switch G Equipped

CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Weight Signal Cable color Product no. Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

HRX-OM-W002

5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 (CN51) (CN1) (CN6) Compressor CM CM 3 1 3 3 [ ] TH 14AWG BK 14AWG BK C AC Power Board CM S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser PCB1 R C1 2 Current Transformer Circuit

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VQ5000

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

VQ5000

Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Electric Actuator/Slider Type

3 !

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HEC_W-E

Signal Style and Part No. 3 1 AC200-220V Power supply connector 2 AC200-220V (HEC006) 3 PE 1 2 D A A AC200-220V Power supply B AC200-220V connector C Unused (HEC012) B C D PE RS-232C RS-485 5 4 3 2 1 1 Unused BUS + 2 RXD (RD) BUS Communication 3 TXD (SD) Unused connector 9 8 7 6 4 Unused Unused D-sub 9 pin (socket type) 5 SG SG Fixed screw: M2.6 6-9 Unused Unused 10-1 Appendix Description