Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Smooth Vent Valve

Description Part no. 1 Bonnet assembly XVD2-02A-30-1 XVD2-02V-30-2 (For VCR) 2 Body assembly XVD2-02S-30-2 (For Swagelok) 3 Exterior seal AS568-024V 526

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

VQZ1000/2000/3000

AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 130 58 24.4 9 9 R3 SY A 2 4 18 13 SMC SMC 4 Cover diameter 1.6 Cross section 0.34mm2 B SYJ 2-C6, C8, C10, 02 38 23.4 Mounting holes Manual override C6: One-touch fittings for 6 SX C8: One-touch fittings for 8 M5 X 0.8 External pilot port (Only external pilot style(R)) C10: One-touch fittings for 10 VK 02: Rc(PT)1/4 VZ (C6, C8) 17.5 10.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02) 38.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

ARX Series

K40-MP0.4-01S K50-MP0.4-02S K40-MP1.0-N01S K50-MP1.0-N02S K40-MP0.4-N01S K50-MP0.4-N02S 1348110A B Regulating pressure range Bracket 7~120psi 7~45psi 0 1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Body Size: 02 (1/4), Free Flow Direction: B (Female Thread to Male Thread), Thread: N (NPT), Port Size: 02S (1/4 + Sealant)

Body Size: 02 (1/4), Free Flow Direction: A (Male Thread to Female Thread), Thread: R(PT), Port Size: 02S (1/4 + Sealant)

Body Size: 02 (1/4), Free Flow Direction: A (Male Thread to Female Thread), Thread: N (NPT), Port Size: 02S (1/4 + Sealant)

Body Size: 02 (1/4), Free Flow Direction: B (Female Thread to Male Thread), Thread: R(PT), Port Size: 02S (1/4 + Sealant)

Body Option: 1 (External Pilot), Port Size: 02 (Rc1/4), Style: 02 (One-way Operation Roller Lever)

Body Option: External Pilot, Port Size: Rc1/4, Style: One-way Operation Roller Lever, Suffix: -, Accessory: -

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

-06F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5

Title not found

(mm) Model KQGL04-00 KQGL06-00 KQGL08-00 KQGL10-00 KQGL12-00 4 6 8 10 12 KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S M5 4 R1/8 M5 6 R1/8 R1/4 Male Branch Tee Male Branch Tee R1/8 8 R1/4 Applicable tubing O.D.

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

Rotary One-touch Fittings Series KS/KX

M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6