3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

PSxx-OMM0002CN

Mpa A 0.8[V]3.2[mA] -51No.PS-OMM0002CN-F Z/ISE80(F)-02/N02/F02/C01/A2/B2/-* 5 4 5 -C01Rc1/8 -F02G1/4 -B2TSJ1/4 -A2URJ1/4 -52No.PS-OMM0002CN-F Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-* 4 5 5 -C01LRc1/8 -A2LURJ1/4 -B2LTSJ1/4 -53No.PS-OMM0002CN-F () ZS-24-A A () ZS-24-D A -54No.PS-OMM0002CN-F () ZS-35-A -55No.PS-OMM0002CN-F ZS-35-C 36 x n +4 x (n -1) -56No.PS-OMM0002CN-F ZS-35-B 36

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08

PSxx-OMV0003CN

OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -33No.PS-OMV0003CN-G [F 3] 0.01 sec.0.0030.00 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(233033) -34No.PS-OMV0003CN-G [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (36) -35No.PS-OMV0003CN-G () OUT1 SET[AP1 REdY] (OUT1[AP1 REdY]UPDOWN1 OUT2) OUT1 OUT1 OUT1 SET[AP1 RUn] ([AP1 RUn]UPDOWN1 OUT2) OUT2 SET[AP2 REdY] (OUT2

PSxx-OMV0008CN

23 [H_2] [WH2] (58) SET 25 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -36No.PS-OMV0008CN-E [F 3] 0.0030.00 sec.0.01 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(253336) -37No.PS-OMV0008CN-E [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (39) -38No.PS-OMV0008CN-E OUT1 SET[AP1 REdY] (OUT1[AP1

PSxx-OMU0008CN

kPa ISE20CH1.000 MPa ONOFF ISE20C0.050 MPa ZSE20C5.1 kPa ZSE20CF5.0 kPa ISE20CH0.100 MPa 1.5 ms OUT1 ON OUT1 OFF -30No.PS-OMU0008CN-D [F 2] OUT2 36 [F 1] OUT1 [F 3] 38 0 ms [F 4] 39 [F 5] FUNC 41 [F 6] 43 0% [F10] 44 std() [F11] 50 1000 [F80] 51 OFF [F81] 52 OFF [F82] 54 A [F90] 55 OFF [F96] 57 [F97] 58 OFF [F98] 60 () [F99] 62 OFF XY "---" -31No.PS-OMU0008CN-D [F 0]

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

F F E E B C Cross spacer E D A F: Without pipe thread Model Note) E (Port size) A B C D Applicable model Y14-M5-A M5 x 0.8 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-A Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-A, AC30l-A Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-A Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-A Y54-l04-A 1/2 Caution on Mounting 1.

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

PFxx-OMJ0005CN

L/min [F 2] 27 [ ] 3% [H_2] (OUT2) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [F 3] [FLU] [Air] N2 28 [F 4] [rEF] [Anr] 29 [F 5] [rES] [1 . 00] 1 s 30 [F 6] [dSP] [inS] 31 [F 7] [inP] [r_r] 32 [F 8] [drE] [1E2] 100 35 [F 9] [PrS] [oFF] 36 [F10] [EEP] [oFF] OFF 38 [F11] [AFL] [ on] 39 [F12] [Eco] [oFF] 40 [F13] [Pin] [oFF] 41 [F98] [ALL] [oFF] 42 [F99]

Compact and Lightweight

L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

70pvpump

N AIR EXH FLUID IN T, F, N are options.

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

ITV

L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Precision Regulator

M6 x P0.5 15.5 9 76 148 Bleed 43 EXH(3) OUT(2) SUP(1) 22 66 Rc 1/2 Exhaust port 68 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 Bottom bracket is not available as an option. 814 A Precision Regulator IR1000/2000/3000 Series Dimensions IR2120-02 IR3120-0 50 82 Mounting hole 36 Mounting hole 60 Bracket (Option) Bracket

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...