High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

2

e !

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

Secondary Batteries

Electric Actuators/Cylinders 6 Electric Actuator Series LJ1/LG1 Electric Actuator with Integrated Guide Series LTF Series LJ1 Short Stroke Electric Actuator Series LX Electric Cylinder Series LZB/LDZB/LZC/LDZC Electric Gripper Series LEHZ/LEHF Series LX Electric Slide Table Series LES e-Rodless Actuator Series E-MY2 Series LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VF5120-1G-032 pcs. (Valve) VF5220-1G-032 pcs. (Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VG300-OMI0003

-2No.VG300**-OMI0003-A V V V VG342 G342 G342 G342 / / / / , 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series 3 3 3 3 / / / / C-R C-R DC % AC 15% SSR SSR SSR SSR AC AC AC AC 1 C-R OFF 2 1V -10 ( ( ( ( ) ) ) ) () 1 -4No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J G E G A B Plug JSXM 1G(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D E F G 20 1/8

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

For AC voltages add 1g to the weight of the single solenoid and 2g to the weight of the double solenoid and 3 position styles.

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: CE Compliant

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 3/4, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

When AC is used, add 1g.

This is a legacy product, and replaced byVG342-3DZ-06NA VG/VGA VALVE. VALVE, SOL. VALVE. VG BODY PT 1/2. 2.64554 lb. JA.