42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Compact Cylinder with Lock Series CLQ

CLJ2 CLQB: Without Auto Switch CLM2 Cylinder model Cylinder model Cylinder model Cylinder model Mounting bolt size CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt size Mounting bolt size CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting

Free Mount Cylinder for Vacuum Series ZCUK

Note 1) In the case of ZCUKQ16-5D: 14.5 mm.

VM

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

CLQ

U Q P Front cylinder port P Rear cylinder port H effective thread depth C F V I D M E 22 11 Z T Minimum lead wire bending radius 10 Auto switch D-A7, A8 Dust cover (manual unlocking unit) 4-OA counter bore N 4-OB counter bore BP unlocking port (unlocks when pressurized) K Flat washer 4 pcs.

Compact Cylinder with Lock Series CLQ

U Q P Front cylinder port P Rear cylinder port H effective thread depth C F V I D M E 22 11 Z T Minimum lead wire bending radius 10 Auto switch D-A7, A8 Dust cover (manual unlocking unit) 4-OA counter bore N 4-OB counter bore BP unlocking port (unlocks when pressurized) K Flat washer 4 pcs.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

w e q w VQC SQ VQ0 4 (B) 2 4 (B) 2 (A) (A) VQ4151 VQ4150 VQ4 VQ5 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 VQZ e q w e q w VQD 4 (B) 2 4 (B) 2 (A) (A) VQ4250 VQ4251 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B

VHK

Flame resistant style 1(P)/2(A): One-touch fitting Effective area Tube O.D (mm) Model (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 1(P)2(A) 2(A)3(R) 18 2(A) 4 1(P) 4 3.4 1.2 47.6 23.8 23.8 16.5 51.6 15.8 15.8 41 3.5 11 VHKlR-04F-04F VHKlR-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHKlR-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHKlR-10F-10F 22 10

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

VHK

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

VHK

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

VHK

D E F G J K C VR 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 3.5 11 3.4 1.2 15 VHK-B1A 1 27 22 26 41 47.6 23.8 23.8 16.5 15.8 15.8 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

S Couplers Series KK/KKH/KK13

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F