NCQ2/CQ2

-10DZ -15DZ -20DZ -25DZ -30DZ (N)CDQ2B16-5DZ -10DZ -15DZ -20DZ -25DZ -30DZ (N)CDQ2B20-5DZ -10DZ -15DZ -20DZ -25DZ -30DZ -35DZ -40DZ -45DZ -50DZ (N)CDQ2B25-5DZ -10DZ -15DZ -20DZ -25DZ -30DZ -35DZ -40DZ -45DZ -50DZ (N)CDQ2B32-5DZ -10DZ -15DZ -20DZ -25DZ -30DZ -35DZ -40DZ -45DZ -50DZ -55DZ-XB10 -60DZ-XB10 -65DZ-XB10 -70DZ-XB10 -75DZ -80DZ-XB10 -85DZ-XB10 -90DZ-XB10 -95DZ-XB10 -100DZ CQ-M5 x

CATALOG

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

V

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

Vacuum System Peripherals:

specifications Port size Solenoid valve , VS3115 1 8 1 4 3.8 4.0 9.0 20 , VS3110 1 4 3 8 Body ported , , , 1 2 3 4 VS3135 1 4 1 2 3 8 VS3145 Series VS 3 port solenoid valve Model/Rubber Seal Series VG342 Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Piping specifications Port size Solenoid valve 210 210 1 2 to 26 to 38 26 to 38 3 4 VG342 1 Body ported 1 2 1 to 3 4 For Vacuum: VG342R

S Couplers

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F

S Couplers Series KK/KKH/KK13

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F

VM

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 1 27 22 26 41 3.5 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

D E F G J K C VR 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 3.5 11 3.4 1.2 15 VHK-B1A 1 27 22 26 41 47.6 23.8 23.8 16.5 15.8 15.8 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

KJ

KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Without check valve Without check valve Male thread type Male thread type Body size Part no.

Table of Contents

KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Without check valve Without check valve Male thread type Male thread type Body size Part no.

3 Port Solenoid Valve/

How to Order 25AVG342 5DZ M X87 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type. Check valve type is available only when the thread type is Rc.

3 Port Solenoid Valve/

How to Order 25AVG342 5DZ M X87 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type. Check valve type is available only when the thread type is Rc.

S Couplers Series KKA

-1 KKA6P-06F-1 Rc3 / 4 Rc3 / 4

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9, Driving

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: F (G)

Secondary Batteries

90 Series compatible with secondary batteries Bracket Nil L None With L-bracket 90 Material restriction *Bracket and screws are attached. 2 2 port valve Valve model Knob color 1(P) port size Gray Nil (Standard) 4 6 8 R 1 8 R 1 4 R 3 8 04F 06F 08F 01S 02S 03S Red R (Option) 2(A) port size 04F 06F 08F 4 6 8 *Specifications and dimensions for the 90-series are the same as standard products.

S Couplers KKA Series Stainless steel type

Check valve on single side: KDM Effective Area No check valve on either side: KB Effective area mm2 Built-in check valve Socket Plug KKA3S-01F KKA3P-01F 17.4 KR Characteristics with check valve on both sides KKA4S-02F KKA4P-02F 26.4 KA KKA6S-04F KKA6P-04F 54.2 Liquid dripping cm3 at each removal Aeration cm3 at each removal Plug: With check valve Socket: With check valve Body size KKA7S-06F