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r t y No. q w e r t y u i o !

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV5 [V] PFMV5 [V] -20No. PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.

KJ

r t y No. q w e r t y u i o !

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: N (NPT)

A

D I M E N S I O N S S E E N E X T P A G E NCDRB1BW30 P211180-1 NC_R1FW30 P211180-2 M O R E A C C E S S O R I E S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Table of Contents

1 e !

AC Servo Motor Driver (Pulse input type/Positioning type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

Stopper Cylinder

0 w q e r t u !

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHF2

4 r t e !6 Parts list Parts list Note Material No. Description No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.

Parallel Style Air Gripper Series MHZ

B 5 A E Auto switch mounting groove (Both sides) Refer to the dimension table. When auto switches are used, side mounting with through-holes is not possible.

MHZ2/MHZJ2

Cylinder bore MHZ2 D E X 7 Cylinder bore MHZ2 D E X46 Not available when equipped with dust cover/MHZJ2.

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N