Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Stopper Cylinder

0 w q e r t u !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA F Q Stroke QB QU QW Built-in One-touch Fittings (mm) Applicable tubing O.D.

MGP

M3 x 0.5 x 30l or more 40, 50, 63 10N 3 M5 x 0.8 x 40l or more 80, 100 24.5N 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type manual release While pushing the M/O knob turn it 90 counter clockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob.

MHZ

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

AC Servo Motor Driver (Pulse input type/Positioning type ）

Refer to POINT of section 3.6.1 for logic of MELSEC iQ-R series/MELSEC-Q series/MELSEC-L series/MELSEC-F series.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Description q Notes No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Description q Notes No.

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

MHY2/MHW2

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

2-Color Display Digital Flow Switch Series PFM

Construction Component Parts q w q o ire uy!0 o t Material No. Description Note 1 Fitting for piping Brass Electroless nickel plated 2 O-ring FKM Fluoro coated 3 O-ring HNBR Fluoro coated Stainless steel 304 4 Rectifying module !

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Pressure Relief 3 Port Valve With Locking Holes

Mass (Handle / Bonnet material) B (Aluminum) 92g 156g 301g 349g 630g (2) Double action type Model VHS2510 VHS3510 VHS4510 VHS4510-06 VHS5510 Fluid Air Ambient and fluid temperature -5 to 60oC (No freezing) Proof pressure 1.5MPa Operating pressure range 0.1 to 1.0MPa Color (Standard) Handle: Red Body: White Handle operation Pushing stroke 3.2mm 4.2mm Switching angle 90o Push force Note1) 10N

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: N (NPT)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.