Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 3-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Bottom, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Number of Ports: 1 (2 Port), Piping: 1 (Bottom Ported), Overall Movement: 0 (4.8mm), Applicable Tubing: 4N [Nylon Ø4/2.5(T0425)], Actuator Type: 32 (Push Button), Suffix: R (Red Push Button)

Number of Ports: 0 (3 Port), Piping: 0 (Side Ported), Overall Movement: 0 (4.8mm), Applicable Tubing: 4N [Nylon Ø4/2.5(T0425)], Actuator Type: 32 (Push Button), Suffix: R (Red Push Button)

Number of Ports: 0 (3 Port), Piping: 1 (Bottom Ported), Overall Movement: 0 (4.8mm), Applicable Tubing: 4N [Nylon Ø4/2.5(T0425)], Actuator Type: 32 (Push Button), Suffix: R (Red Push Button)

Number of Ports: 2 Port, Piping: Bottom Ported, Overall Movement: 4.8mm, Applicable Tubing: 4N [Nylon Ø4/2.5(T0425)], Actuator Type: Push Button, Suffix: Red Push Button

Table of Contents

Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 4 3 2 1 Component Parts E No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated Material Brass Brass NBR D C POM, Stainless steel M Applicable tubing b Applicable tube a B A Reducer: M-32R

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Fitting size D 3.2 4 Weight g B C E F A Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Parts list Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 3

T

Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 4 3 2 1 Component Parts E No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated Material Brass Brass NBR D C POM, Stainless steel M Applicable tubing b Applicable tube a B A Reducer: M-32R

Miniature Tubing & Miniature Fittings

(mm) Fitting size D 3.2 4 Weight g B C E F A Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Parts list Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 3 World Wide QS\E Support...

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping port ( ): VVP460 Grommet Individual EXH: VVP450Station 2Port size VVP460Station 2Port size Conduit terminal DIN terminal Piping port G 1/2 G 1/2 Mounting hole Applicable cable O.D. 6 to 12 4n-1/2, 3/4 Piping port (3/4, 1) Stations n: Station L

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Series AK1000

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

switch With auto switch Bore size (mm) Stroke range (mm) L1 L CZ CX CW CU CT CD A B CL A 60 70 68.5 78.5 80.5 90.5 B 23 33 29.5 39.5 30.5 40.5 CL 50 60 58.5 68.5 66.5 76.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 Rod end nut 32 Rod end male thread 7 36 18 20 14 5 10 28.5 70 33 60 40 7 36 18 22 14 6 10 28.5 78.5 39.5 68.5 Double clevis style: CQ2D/CPQ2D 50 8 44 22 28 20 7 14 33.5 4N

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

switch With auto switch Bore size (mm) Stroke range (mm) L1 L CZ CX CW CU CT CD A B CL A 60 70 68.5 78.5 80.5 90.5 B 23 33 29.5 39.5 30.5 40.5 CL 50 60 58.5 68.5 66.5 76.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 Rod end nut 32 Rod end male thread 7 36 18 20 14 5 10 28.5 70 33 60 40 7 36 18 22 14 6 10 28.5 78.5 39.5 68.5 Double clevis style: CQ2D/CPQ2D 50 8 44 22 28 20 7 14 33.5 4N

Fluoropolymer Piping Equipment

LQ1F4: LQ-4N LQ1F5: LQ-5N Note 4) Combinations will differ depending on the type of each fitting. For the availability of combinations, refer to pages 885 to 888. Note 5) For details of the applicable tubing sizes, refer to page 945.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size