High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W S Model LVA2m LVA3m LVA4m LVA5m LVA6m Model LVA20 LVA30 LVA40 LVA50 LVA60 12.5 70.5 24 92.5 A B A B 29 110.5 SMC SMC 34.5 147 36 156 (mm) Dimensions A B R U P C D E G H J K L M N Q Model Rc 1/4 NPT 1/4 LVA2m 30 36 61 44 14.5 35 13 4 20 37 3.5 30 M5 x 0.8 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3m 36 47 81.5 56 19 45.5 17.5 7.5 34 46 5.5 41.5 Rc 1/2 NPT 1/2 LVA4m

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

Series KV2 Fittings

How to Order TIV 07 B 33 Length per Roll (Meters) Tube Model 33 77 153 305 See Packaging Table below. Not Available in all sizes and all colors.

LEC-OM071xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W S Model LVA2 LVA3 LVA4 LVA5 LVA6 Model LVA20 LVA30 LVA40 LVA50 LVA60 11.5 70.5 24 92.5 A B A B 29 110.5 SMC SMC 34.5 147 36 156 Dimensions (mm) A B C E D G H J K L M N R U P Q Model Rc 1/4 NPT 1/4 LVA2 30 36 61 44 14.5 35 13 4 20 37 3.5 30 M5 x 0.8 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 36 47 81.5 56 19 45.5 17.5 7.5 34 46 5.5 41.5 Rc 1/2 NPT 1/2 LVA4 46 60

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

7ND9071en

Class I, Division 2, Groups A, B, C, and D; T4/ T5/T6 Ex nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga Class I, Zone 2 AEx nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga ND_E2 CSA Std C22.2 No.25-1966, CSA Std C22.2 No.30-M1986, CAN/CSA-C22.2 No.94-M91, C22.2 No. 142-M1987, CAN/CSA C22.2 61010-1-04, CAN/CSAC22.2 No 60079-0-07, CAN/CSA-C22.2 No 60079-1-07, CAN/ CSA C22.2 No 60079-31

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

LEC-OM069xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

Speed Controller with One-touch Fitting

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4

LEC-OM02704CN

0] 1EA5 [ 8 ][ B ] [0][0] 0 () OFFON CC-Link . 100ms 14 35 14 (b) // [A][0] [4][1] STOP () [A][0] [4][1] GO . () [A][0] [4][1] CLR . 14 36 14 (4) 1 11 1 [ 8 ][ B ] [0][0] 0005(1 ) [ 9 ][ 2 ] [ 0 ][ 1 ] 16 LSPLSN LSPLSN [ 9 ][ 2 ] [ 9 ][ 2 ] ON(SON) [ 0 ][0] [ 0 ][0] 00020 0 07 0002000 1 (SONLSPLSN MD0) SONMD0) ( ) ( ) [ 9 ][ 2 ] [ 9 ][ 2 ] [0][0] [0][0]

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

A b . A b . A PLCetc Axis Axis Axis No. 1 No. 2 No. 3 "b01" is displayed on axis No. 1, "Ab." is displayed on axis No. 2 and later. PC or PLCetc Controller After PC or PLCetc reset 0 1 b b . A b . A One axis is connected per reset.

Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

Compact manifold regulator ARM5 Series

ARM5 A 4 07 AMR Individual supply type ARM ARM 2.