This is a legacy product, and replaced byVFS6110-5DZ-Q VFS6000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFS6000. 7.75336 lb. 2D.

This is a legacy product, and replaced byVK334-5DZ-01-Q VK300 SOL VALVE 3-PORT. VALVE, SGL SOL, BASE MT. VALVE. VK300 BASE MT 1/8. .64059 lb. NA.

2

M Q Q Note) D is maximum diameter.

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

Air Slide Table

ZZ MXQ 8A-mm2 With end lock (8) Pilot port 2 x M5 x 0.8 Dimensions Q 5 J [mm] Model J Q MXQ8A-10Zm2 61.5 5.5 30 MXQ8A-20Zm2 71.5 MXQ8A-30Zm2 81.5 MXQ8A-40Zm2 97.5 MXQ8A-50Zm2 124.5 MXQ8A-75Zm2 139.5 43 7.5 0.5 5 8.5 38 3 3 26.4 3 MXQ8A-75Z2 5.5 5 J * Dimensions other than those listed above are the same as those for the standard type.

VCL

(mm) 2 4 3 5 7 10 1/8 (6A) V V V V 2 1/4 (8A) V V V V 1/4 (8A) V V V V 3 3/8 (10A) V V V V V 1/2 (15A) V 1/4 ( 8A) V V V V Available types of electrical entry are either G, C and T.

/

assembly 6 (NBR, FKM, EPDM) Stainless steel, Brass (C37) 32A to 50A (NBR, FKM, EPDM) Stainless steel Stainless steel 8A to 50A Valve spring 7 Stainless steel 8A to 50A Tube assembly 8 (NBR, FKM, EPDM) Stainless steel, PPS 8A to 50A Armature assembly 9 Stainless steel 8A to 50A Return spring 10 8A to 50A Solenoid coil 11 SK 8A to 50A Clip 12 The materials in parentheses are seal materials

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

0.4

w r e q w EX510 SQ2130 SQ2131 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) F kit Double: SQ2231D Double: SQ2230D r e q w r w e q P SQ2230D SQ2231D 2 (B) (A) 4 2 (B) (A) 4 kit (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) J kit 3 position:SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 r e q w r e q w T kit L kit SQ2331 SQ2431 SQ2531 SQ2330 SQ2430 SQ2530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Table of Contents

ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.