Size: ø10, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: 1 [ø7], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: FPM seal, Thread: Rc(PT), Port Size: 1/8, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet, Manual Override: -, Bracket: -, CE Compliant: -

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

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VXD2A, 2B VXD2C, 2D VXD2E to 2G VXD2A to 2G VXD2A to 2G VXD2A to 2D VXD2A, 2B Body 1 Bonnet 2 Diaphragm assembly Spring O-ring Buffer Sleeve assembly Push rod assembly Stopper O-ring A O-ring B Adapter O-ring C Solenoid coil 3 4 5 6 7 8 9 10 11 12 13 14 VXD2A to 2G 137 VXD Series For Air For information on handling One-touch fittings and appropriate tubing, refer to page 167 and KQ2 series

1

SY5000: SY5000-221-6A (2 pcs.) SY7000: SY7000-221-6A (3 pcs.)

SY

For SY5000 [SY5000-6A-01] [SY5000-6A-C6] Description No. Note Material Die-cast aluminum (SY3000 is die-cast zinc.)

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

Air Slide Table

MXQ 6A-Z Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc.

VDW

A G H LVC Stations C37 LVA For 2 stations For 3 stations OUT port size 1 2 Stainless steel LVH Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 LVD VVCW20 6A LVQ Material Pipe material Seal material NBR FKM NBR FKM Symbol Nil A G H LQ C37 Note) Consists of a set for D and U sides.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

How to Order Connector Assembly VQC VQZ SQ For 12, 24 VDC VFS For SY5000/7000 SY5000-37-3A Specifications For SY3000 For single solenoid SY3000-37-3A Double solenoid, 3 position type SY3000-37-4A VFR SY5000-37-4A Single with spacer assembly SY5000-37-3A VQ7 SY5000-37-5A Double, 3 position with spacer assembly SY3000-37-6A SY5000-37-6A For 100 VAC Specifications For SY3000 For single solenoid

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

VDW Series

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

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However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

SQ1000/2000

B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

) 1 8 (6A) 320 4.5 2 300 3 3 1.0 7.9 0.33 500 320 500 660 500 660 1 4 (8A) 4.5 15 0.61 470 620 470 620 560 700 560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

VNB

Refer to Table (2) to select the port size of the threaded type (6A to 50A) and flanges (32F to 50F).

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (6A) 110g 1 8 Weight (Basic) Model Actuator part No.

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.