5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-9A(-Q) SY5000 SY5000-26-20A(-Q) SY7000 SY7000-26-22A(-Q) SY9000 SY9000-26-2A(-Q) Series Gasket assembly part no. SY3000-GS-2 SY5000-GS-2(-Q) SY7000-GS-2(-Q) Series Assembly part no.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump Weight (dry state) 333 lbs (151 Kg) 339 lbs (154 kg) Note 4) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC Note 5) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid temperature

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

Coolant Valve

623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60

Pulse Valve

IN side IN side IN side 12 ATEX Compliant Pulse Valve Valve for Dust Collector 55-JSXFA Series RoHS II 2 G Ex h IIB T6 Gb II 2 D Ex h IIIB T72C Db 40C Ta +60C How to Order JSXFA B 06 R E 1 55 Compression fitting type Direct piping type e r t y w q w IN/OUT port size ATEX category 2 q Piping e Thread type E Compression fitting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

High Pressure Coolant Valve

50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148

Table of Contents

0 IS1000 No. q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.