INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: YZ (EN 175301-803C terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single)

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with Soft Start Function

High Vacuum Angle Valve

D-G

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10-D CDRBU2W15, 20, 30-D (Figures below show size 20 actuators.) 2 x M3 x 0.5 through 2 x 3.5 through 2 x 3.5 through 17 2 x S2 2 x S1 10.5 B port A port 0.5 9 2 x S1 2 x S1 3 2 x M5 x 0.8 (Connection port) 10.5 2 x 3.5 through A port B port 2 x R D-90 ,D-S99 D-90A ,D-T99 3 D-97 D-93A (3m) 0.5m 18.5 2 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Table of Contents

Series VQ0 Body Ported Plug Lead Unit: Flip Type How to Order Manifold VV5Q 0 D S1 F 4 08 Series Option Manifold VQ0 0 Nil D (2) None (C kit only) DIN rail mounting style Special wiring specifications (Except double wiring) 4 Plug lead unit/Flip K (3) N S (4) With name plate Built-in silencer, direct exhaust Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

Table of Contents

D. Applicable tube O. D.

ZX

D: Unit for replacement Ex.) If an adsorption confirmation switch is replaced for a vacuum switch on ZX1071-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-49 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

2

D H Note) D is maximum diameter.

Electric Actuator/Slider Type

0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

Series VQ Base Mounted Metal Seal/Rubber Seal

D side.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.