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/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

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8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Rotary Actuator/Vane Type

1 y u i D-M9m !6 Component Parts No. Description Material No.

EXxx-OMY0006CN

DIP (2 6 ) DIP SW2:2 SW3:6 M12 SW3 DIP DIP =0.6Nm SI M12 Fig. 10-8 O N O N 1 2 1 2 3 4 5 6 SW3 SW2 Fig. 10-9 SW3 and SW2 DIP switches DIP SI DIP SI 66 No.EX##-OMY0006CN 10.11.2.1. SW2 10.11.2.2.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

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V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise <Fig. 2-2> <Fig. 1-2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

CRB2/CRBU2/CRB1

Stopper ring Block (C) Stopper ring Block (D) Block (D) Block (C) Counterclockwise <Fig. 2-2> Counterclockwise <Fig. 1-2> The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation to end of rotation .

HRX-OM-X084

amount of the facilitywater for the opution with rated circulating fluid, cooling capacity which are described in fig.9-6 and fig.9-8.

HRX-OM-O021

Refer to Fig. 8-6 Plug to the piping of the product to mount the plug to the piping of the product. Fig. 8-6 Plug to the piping of the product Connection to the drain (ball valve) When connecting piping to the drain (ball valve), fix the ball valve with a spanner.

HRX-OM-M090

Refer to Fig. 8-6 to mount the plug to the piping of the product.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-W038

Refer to Fig. 8-6 to mount the plug to the piping of the product.

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Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

Compact 5-Port Solenoid Valve

Fig. 3 Fig. 3-A Fig. 6 ZK2 Combination Manifold Station number indicated on the connector Joint Use caution regarding the direction. Fig. 6 Tapping screw (Tightening torque: 0.32 Nm) Fittings, Replacement Parts, Tools U side Manifold Options Specific Product Precautions D side !

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C D E F Dimensions Part no.

HRX-OM-R016

Refer to Fig. 8-6 to mount the plug to the piping of the product.

HRX-OM-X037

Temporary piping for DI filter(CH2) Fig. 8-5 Temporary pipe installation for DI filter For CH1 For CH2 Fig. 8-6 Temporary pipe installation for DI filter(For option D1) 6.

HRX-OM-R005

Refer to Fig. 8-6 Plug to the piping of the product to mount the plug to the piping of the product. Fig. 8-6 Plug to the piping of the product Connection to the drain (ball valve) When connecting piping to the drain (ball valve), fix the ball valve with a spanner.