VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

Table of Contents

Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

VQZ1000/2000/3000

VQ1000FPG-FB 16 16 stations VVQ1000-FPG-06 6 stations of manifold VQ1000-FPG-C4M5-D: 3 sets VQ1000-FPG-C6M5-D: 3 sets Double check block 0.22 to 0.25 Nm Note) It is the tightening torque for mounting a bracket for the perfect block. 2-7-24 Body Ported 25 25 Series VQZ1000/2000/3000 Plug Lead Unit: Manifold Manifold Option Double check block (Externally placed downstream

The VQ7-□-FPG perfect valve is a valve in which a perfect spacer (VV71-FPG/VV72-FPG) with a pilot check valve function is inserted between the exhaust center and the base. Although it can hold the cylinder at an intermediate position for longer than the type with a closed center (metal seal), with the perfect valve, it cannot be guaranteed that the position will not deviate.

AS-FPQ/AS-FPG

AS-FPG/Stainless steel 304 ASP Release button color: Light blue ASN Flow Rate and Sonic Conductance AQ AS121FP-M5 4 6 100 0.28 0.2 0.4 0.25 0.2 0.3 0.3 0.25 0.2 0.25 0.3 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 6 8 230 0.64 8 10 460 1.3 6 8 10 12 920 2.6 10 12 4 4 6 ASV Tubing O.D.

AS-FPQ/AS-FPG

AS-FPG/Stainless steel 304 ASP Release button color: Light blue ASN Flow Rate and Sonic Conductance AQ AS121FP-M5 4 6 100 0.28 0.2 0.4 0.25 0.2 0.3 0.3 0.25 0.2 0.25 0.3 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 6 8 230 0.64 8 10 460 1.3 6 8 10 12 920 2.6 10 12 4 4 6 ASV Tubing O.D.

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 stations of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double check block 1.10-194 VQ 0/1000 Plug Lead Unit Base Mounted Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Table of Contents

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 types of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double Check block 2-4-25 Body Ported 26 Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

PWhen screwing the fittings in the double check block, applied torque is as shown below: Stations 01 1 stations 16 stations 16 VVQ2000-FPG-06 6 stations of manifold VQ2000-FPG-C6C6-D; 3 sets VQ2000-FPG-C8C8-D; 3 sets Double check block Torque Nm Thread Rc(PT)1/8 Rc(PT)1/4 7 to 9 12 to 14 PSet the cylinder load so that the cylinder pressure will be within two times that of the

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

SMC

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9