15

FG 25ASize 32: NM2 Size: 63 LEC 4 x FA thread depth FB Motor mounting surface LEC S 2 x FA thread depth FB LEC SS-T LEC Y FD+0.3 +0.1 FD FC Motorless Motorless FC LAT FE FG FF FF FG FC LZ LC3F2 Dimensions [mm] Size Motor type FA FB FC FD FE FF FG M1 T1 M2 T2 PD PP NZ M4 x 0.7 7.5 46 30 3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NY M3 x 0.5 5.5 45 30 5 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5

Series SV

fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 A, B ports mixed 8 One-touch fitting 5/16" One-touch fitting SV1000 SV1000 3/8" One-touch fitting 10 One-touch fitting SV2000 SV2000 12 One-touch fitting 3/8" One-touch fitting SV3000 SV3000 3/8" One-touch fitting 12 One-touch fitting SV4000 NPT 3/8 SV4000 Rc 3/8 NPTF 3/8 G 3/8 In case of mixed specification (M), indicate separately on a manifold specification

SV

fitting for 3/8" One-touch fitting for 5/16" One-touch fitting for 3/8" NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 One-touch fitting for 5/16" SV1000 P, E port location One-touch fitting for 3/8" SV2000 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) One-touch fitting for 3/8" SV3000 SUP/EXH block assembly specifications One-touch fitting for 3/8" Nil S R RS

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-02-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 32 (33) AS33l1FG-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS43l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG

LEC-OM071xx

MECHATROLINK-II Command.8-4 8.1 Layers.8-4 8.2 Frame Structure.8-4 8.3 State Transition Diagram.8-5 8.4 Command and Response Timing.8-6 8.4.1 Command Data Execution Timing.8-6 8.4.2 Monitored Data Input Timing.8-6 8.4.3 Supporting the Transmission Cycle of 125 s.8-7 8.5 List of Commands.8-8 8.5.1 Command Types.8-8 8.5.2 Main Commands.8-8 8.5.3 Subcommands.8-10 8.5.4 Combinations of Main Commands

2

26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)

SQ1000/2000

compatible 16 1 to 8 stations 16 stations SUNX Corporation: S-LINK System (16 outputs) compatible SUNX Corporation: S-LINK System (8 outputs) compatible 8 1 to 4 stations 8 stations D side Device Net, OMRON Corporation: CompoBus/D compatible 16 1 to 8 stations 16 stations OMRON Corporation: CompoBus/S (16 outputs) compatible OMRON Corporation: CompoBus/S (8 outputs) compatible 8 1 to 4 stations

LEC-OM069xx

2 8.

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

e

(mm/s) Speed (mm/s) 1121 Model Selection Maximum Allowable Moment/Maximum Load Mass Moment: E-MY2HT (Double Axis) E-MY2HT/M1 E-MY2HT/M3 E-MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment (NNm) Moment (NNm) Moment (NNm) 50 50 50 40 40 40 E-MY2HT25 E-MY2HT25 E-MY2HT25 30 30 30 20 20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000

VK3000

stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve

Table of Contents

(mm/s) 2000 10 32 1/4 1/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

SY

(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-13 (S) 1/2" 19.3 30.9

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

A_HEC-OM-K001

/8 3/4x5/8 1/2x3/8 3/4x5/8 Recirculating fluid (Note 6,7,8) Pure water, Hydrofluoric acid, Ammonia hydrogen peroxide solution etc.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM