Series VQ Metal Seal/Rubber Seal Body Ported

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 50 to 200, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15~1, Driving Type:

Symbol: 3-Position, Closed Center, Solenoid: Double, Voltage: 24V DC, Option: Indicator Light, Seal: Metal Seal, Subplate: Side Ported 3/8, Thread: Rc, Connector: Pre-wired Connector

Symbol: 3-Position, Pressure Center, Solenoid: Double, Voltage: 24V DC, Option: Indicator Light, Seal: Metal Seal, Subplate: Side Ported 3/8, Thread: Rc, Connector: Pre-wired Connector

Symbol: 3-Position, Exhaust Center, Solenoid: Double, Voltage: 24V DC, Option: Indicator Light, Seal: Metal Seal, Subplate: Side Ported 3/8, Thread: Rc, Connector: Pre-wired Connector

Symbol: FHG (3-Position, Closed Center), Solenoid: D (Double), Voltage: 3 (24V DC), Option: N (Indicator Light), Seal: Metal Seal, Subplate: A03 (Side Ported 3/8), Thread: Rc, Connector: SC (Pre-wired Connector)

Symbol: FIG (3-Position, Pressure Center), Solenoid: D (Double), Voltage: 3 (24V DC), Option: N (Indicator Light), Seal: Metal Seal, Subplate: A03 (Side Ported 3/8), Thread: Rc, Connector: SC (Pre-wired Connector)

Symbol: FJG (3-Position, Exhaust Center), Solenoid: D (Double), Voltage: 3 (24V DC), Option: N (Indicator Light), Seal: Metal Seal, Subplate: A03 (Side Ported 3/8), Thread: Rc, Connector: SC (Pre-wired Connector)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: N (Indicator Light), Seal: Metal Seal, Subplate: A03 (Side Ported 3/8), Thread: Rc, Connector: SC (Pre-wired Connector)

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 stations of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double check block 1.10-194 VQ 0/1000 Plug Lead Unit Base Mounted Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Table of Contents

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 types of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double Check block 2-4-25 Body Ported 26 Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

7.4

22 14.2 2n x C2, C4, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 4.5 11.5 4.5 2 x Rc1/8 1(P) port Grommet M3 x 0.5 External pilot port (External pilot type) 300 (Lead wire length) n 8 7 6 5 4 3 2 1 Stations D side U side 49.8 40.5 83.6 (Double solenoid dual 3-port) 58.5 (Single solenoid) 91 (Closed center

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

PWhen screwing the fittings in the double check block, applied torque is as shown below: Stations 01 1 stations 16 stations 16 VVQ2000-FPG-06 6 stations of manifold VQ2000-FPG-C6C6-D; 3 sets VQ2000-FPG-C8C8-D; 3 sets Double check block Torque Nm Thread Rc(PT)1/8 Rc(PT)1/4 7 to 9 12 to 14 PSet the cylinder load so that the cylinder pressure will be within two times that of the

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

SMC Pneumatic Clean Series

MM NA 20, 25 2-Eh8 D Standard port Relief port 45 AL 1.5 A 1.5 K F N N H S + Stroke F ZZ + Stroke 32, 40 (mm) H2 22 17 17 13 B1 41 32 32 26 B2 H H1 11 8 8 8 13 F Bore size AL K MM NA NN G ZZ S P N I E D A 0 50 45 45 41 6 6 5 8 8 8 14 12 10 8 20-0.033 21 19.5 19.5 15.5 154 122 120 116 1/8 24 22 22 18 40 32 25 20 42.5 34.5 30 24 21.5 15 15 15 88 64 62 62 7 5.5 5.5 5 46.5 37.5 33.5 28 M26 x

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

SMC

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B